Interferometric Mirror Positioning With Gas-Cell Laser Stabilization

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Solution Overview

Problem

Existing spectroscopic and shape measurement devices face challenges in maintaining accurate wavelength stability of laser light, leading to decreased measurement precision of the moving mirror's position, which affects the accuracy of spectral and shape measurement results.

Innovation Solution

Incorporating a gas cell with a gas that absorbs light of a predetermined wavelength, an emitted light amount detection unit, and a light source control unit to stabilize the wavelength of laser light, along with a length measurement optical system and calculation device to enhance the accuracy of moving mirror position measurement.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If laser light is used for wavelength measurement, then measurement speed and resolution are improved, but wavelength stability deteriorates over time due to various causes

Engineering Contradiction:
Improveposition measurement accuracyVSAvoidwavelength stability
Core Design Contradiction:
Measurement precisionVSStability of the object's composition

Solution Approach 1:

The patent implements a feedback control system where the detected wavelength information is fed back to adjust and stabilize the laser light source, maintaining consistent wavelength despite environmental variations or aging effects

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The patent introduces an intermediary reference system (such as a reference laser or wavelength reference) that mediates between the measurement laser and the detection system, providing a stable reference for wavelength calibration and compensation

Inventive Principle:
Principle #24Intermediary (Mediator)

2Productivity

If the laser light source operates for extended periods, then productivity is improved, but wavelength stability deteriorates due to changes over time

Engineering Contradiction:
Improvecontinuous operation capabilityVSAvoidwavelength stability
Core Design Contradiction:
ProductivityVSStability of the object's composition

Solution Approach 1:

The patent performs preliminary wavelength calibration and stabilization setup before continuous measurement operations begin, and includes periodic recalibration mechanisms to maintain wavelength stability throughout extended operation periods

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The feedback control system continuously monitors wavelength drift during operation and makes real-time adjustments to the laser source parameters, enabling stable continuous operation without wavelength degradation

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Stabilizes the wavelength of laser light, improving the accuracy of spectral pattern generation on the wavenumber axis and shape measurement results.

Implementation Method 1

a gas cell with a gas that absorbs light of a predetermined wavelength sealed therein

Methodology Applied
Scientific EffectAbsorption (EM radiation): Absorption (EM radiation)

Implementation Method 2

an interference optical system into which measurement light and laser light are incident is implemented by the beam splitter unit, the movable mirror, and the fixed mirror

Methodology Applied
Scientific EffectOptical interference: Interference

Implementation Method 3

The mirror unit includes a movable mirror that moves in a predetermined direction and a fixed mirror whose position is fixed

Methodology Applied
Scientific EffectReflection: Reflection

Data Source

PatentUS12571681B2Spectroscopic device and shape measurement device comprising an analysis optical system and a length measurement optical system
Publication Date: 2026.03.10 SEIKO EPSON CORP
  • US12571681B2 patent drawing
  • US12571681B2 patent drawing
  • US12571681B2 patent drawing

AI summary

A spectroscopic device includes: an analysis optical system; a length measurement optical system; and a calculation device. The analysis optical system includes a moving mirror and a first light receiving element. The length measurement optical system includes a second light source configured to emit laser light, a gas cell with a gas that absorbs light of a predetermined wavelength sealed therein and configured to cause the laser light to be incident thereon, an emitted light amount detection unit configured to detect an amount of light emitted from the gas cell and output an emitted light amount detection signal, a light source control unit configured to control a wavelength of the laser light based on the emitted light amount detection signal, and a length measurement unit configured to use the laser light to obtain a displacement signal corresponding to a position of the moving mirror, and the calculation device includes a moving mirror position calculation unit, a light intensity calculation unit, and a Fourier transform unit configured to generate a spectral pattern.