Mirror Replacement in Projection Exposure Apparatus
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Solution Overview
Problem
The replacement of mirrors in projection exposure apparatuses requires high positional accuracy, leading to significant adjustment outlays due to the need for precise alignment of optical components, which is time-consuming and error-prone without advanced measurement techniques.
Innovation Solution
A method involving the use of a position- and orientation data measuring device to measure and rework the bearing points of a replacement mirror to match the exact position and orientation of the original mirror, allowing for precise installation without further adjustments, using techniques such as spacer insertion and material ablation, and considering the specific configuration of facet mirrors and illumination channels.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If traditional mirror replacement methods are used without advanced measurement techniques, then the replacement process is simpler, but the positioning accuracy decreases and adjustment outlay increases
Solution Approach 1:
The patent applies preliminary action by measuring the position and orientation data of bearing points on both the original mirror and replacement mirror before installation. This pre-measurement allows for calculating deviation values and determining necessary adjustments in advance, eliminating the need for time-consuming trial-and-error adjustments during actual mirror replacement.
Solution Approach 2:
The patent replaces manual mechanical adjustment with an automated measurement and calculation system. A measurement device captures position and orientation data, a computing device calculates deviation values and adjustment requirements, and this information guides precise positioning, substituting traditional mechanical trial-adjustment methods with a systematic measurement-based approach.
2Reliability
If manual adjustment methods are used for mirror replacement, then the process is faster to set up, but the time required for precise alignment increases and errors are more likely
Solution Approach 1:
The patent implements feedback by using measurement data from the original mirror to establish reference values, then measuring the replacement mirror and calculating deviation values. This feedback loop provides quantitative information about positioning errors, enabling precise corrections to achieve accurate alignment without repeated trial adjustments.
Solution Approach 2:
The measurement and calculation of deviation values is performed before mirror installation, allowing all necessary adjustment information to be prepared in advance. This preliminary action eliminates time-consuming on-site adjustments and reduces replacement time while maintaining high alignment accuracy.
3Ease of manufacture
If bearing points are not precisely reproduced on the replacement mirror, then the replacement process is simpler, but the mirror surface position deviates from the original and requires further adjustments
Solution Approach 1:
The patent uses optical measurement devices and computational algorithms to precisely determine bearing point positions and calculate deviations, replacing imprecise manual measurement methods. This substitution enables accurate reproduction of bearing point locations on the replacement mirror, ensuring correct mirror surface positioning without requiring complex manual adjustment procedures.
Data Source
AI summary
When replacing a mirror in a projection exposure apparatus, a mirror for replacement is initially removed (41). Position- and orientation data of the removed mirror for replacement are measured (43) by a position -and orientation data measuring device. Furthermore, position- and orientation data of a replacement mirror, to be inserted in place of the mirror for replacement, are measured (46) using the position- and orientation data measuring device. Bearing points of the replacement mirror are reworked (48) on the basis of ascertained differences between, firstly, the position- and orientation data of the mirror for replacement and, secondly, the position- and orientation data of the replacement mirror. The reworked replacement mirror is installed (54). This yields a mirror replacement method, in which an adjustment outlay of the replacement mirror in the projection exposure apparatus is reduced.