Mirror-Based Substrate Container Inspection Without Repositioning
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Solution Overview
Problem
Existing substrate container inspection methods require repositioning of containers to inspect multiple surfaces, leading to longer inspection times and cumbersome handling, and there is a need to efficiently detect defects and contamination in substrate containers like FOUPs.
Innovation Solution
An inspection system with movable mirrors and cameras that provide simultaneous viewing and imaging of multiple container surfaces, allowing efficient detection of defects and contamination without repositioning, using translational and pivotal movements to capture high-resolution images.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If containers are repositioned to inspect multiple surfaces sequentially, then inspection coverage is improved, but inspection time and handling complexity increase
Solution Approach 1:
The patent introduces a temporal dimension to the inspection process by capturing multiple surface views simultaneously through a time-sequence imaging mechanism. The camera system captures images of different container surfaces in rapid succession, creating a composite inspection view that covers multiple surfaces without requiring physical repositioning of the container. This resolves the contradiction by maintaining comprehensive inspection coverage while eliminating the time loss associated with sequential repositioning operations.
Solution Approach 2:
The patent creates optical copies of container surfaces through imaging and uses these copies for inspection purposes. By capturing images of multiple surfaces and processing them to create a composite view, the system inspects the container through copies rather than requiring direct physical access to all surfaces simultaneously. This eliminates the need for cumbersome handling and repositioning while maintaining complete inspection coverage.
2Measurement precision
If containers are repositioned to inspect multiple surfaces, then all surfaces can be viewed, but handling becomes more cumbersome
Solution Approach 1:
The patent replaces the mechanical repositioning system with an optical imaging system. Instead of physically moving the container to bring different surfaces into the camera's field of view, the system uses a movable camera mechanism that captures images of multiple surfaces and processes them computationally. This substitution eliminates the mechanical handling complexity while maintaining complete surface inspection capability.
Solution Approach 2:
The patent introduces an image processing system as an intermediary between the camera and the final inspection result. The processing unit receives images from the movable camera, aligns and combines them into a composite view, and presents the complete surface inspection data without requiring physical manipulation of the container. This intermediary computational step simplifies the operational process while achieving comprehensive coverage.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Facilitates faster and more effective inspection of substrate containers by enabling simultaneous viewing and imaging of multiple surfaces, reducing handling complexity and improving defect detection efficiency.
Implementation Method 1
at least one mirror arranged and configured to provide a simultaneous view of at least a first one and a second one of the plurality of surfaces
Data Source
AI summary
The present disclosure relates to an inspection system configured and adapted for inspecting a substrate container or a component of a substrate container, the container or the component including a plurality of surfaces, the system including at least one mirror arranged and configured to provide a simultaneous view of at least a first one and a second one of the plurality of surfaces.