Electro-optical Device Mirror Support Post Sacrificial Layer Removal
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Solution Overview
Problem
Existing electro-optical devices face challenges in manufacturing mirror support posts without residual sacrificial layers and surface dents, leading to reduced reflectance and increased processing time due to the need for thick inorganic material accumulation and potential gas generation from resin layers.
Innovation Solution
A method involving a cylindrical mirror support post formed as one piece with a torsion hinge, where the first end portion is open and the second end portion is a flat plate, allowing for efficient removal of sacrificial layers and preventing gas generation, thus maintaining reflectance and structural integrity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a sacrificial layer is used to form a mirror support post, then the manufacturing process is simplified, but residual sacrificial layer remains on the support post surface causing surface dents and reduced reflectance
Solution Approach 1:
The patent extracts the harmful residual sacrificial layer from the support post surface by forming an opening that extends through the support post to the substrate. This allows complete removal of the sacrificial layer material (e.g., resin) that would otherwise remain and cause surface dents, while preserving the beneficial ease of manufacture using sacrificial layers.
Solution Approach 2:
Instead of trying to prevent the sacrificial layer from remaining on the surface, the invention inverts the approach by deliberately creating an opening to remove it. The support post is designed with an internal cavity that is filled with sacrificial material during manufacturing, then the material is completely removed through the opening, achieving a clean surface without residual dents.
2Manufacturing precision
If inorganic material is accumulated to fill a concave portion on the support post, then the surface dent is eliminated, but the processing time to grind and remove the inorganic material is significantly increased
Solution Approach 1:
The patent uses a removable opening structure that allows the sacrificial layer to be completely extracted and discarded. This disposable approach to the sacrificial material eliminates the need for time-consuming grinding and removal of inorganic filling materials, as the opening provides direct access to remove the sacrificial layer without leaving residues that require extensive post-processing.
3Strength
If a metal layer is laminated on a columnar resin layer to form a mirror support post, then the structural integrity is improved, but gas is generated from the sacrificial layer when temperature increases, reducing mirror reflectance
Solution Approach 1:
The patent extracts the harmful gas-generating sacrificial layer from the support post structure by forming an opening that allows complete removal. This eliminates the source of gas generation that would occur during device operation when temperature increases, while still providing sufficient structural support through the metal layer configuration.
Solution Approach 2:
The support post is segmented into a metal layer structure that provides structural integrity and an internal cavity that accommodates the sacrificial layer. The opening creates a separation between the structural function (metal layer) and the sacrificial function (resin layer), allowing the sacrificial material to be completely removed without compromising the structural support provided by the metal framework.
4Adaptability or versatility
If multiple layers and intermediate insulating layers are formed to create a torsion hinge and mirror support post, then the device functionality is achieved, but the manufacturing steps become complicated
Solution Approach 1:
The patent merges the torsion hinge and mirror support post into a single integrated structure formed by one continuous metal layer. This consolidation eliminates the need for separate intermediate insulating layers and multiple patterning steps, reducing manufacturing complexity while maintaining the functional independence of the torsion hinge mechanism and the support post structure through their geometric design.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables efficient mirror formation without surface dents, maintains reflectance by preventing gas attachment, and simplifies the manufacturing process by eliminating the need for thick inorganic filling, thereby enhancing the reliability and light utilization efficiency of the electro-optical device.
Implementation Method 1
it is possible to drive the mirror using an electrostatic force which is generated between the mirror and the address electrode
Implementation Method 2
reflectance of the surface (reflective surface) of the mirror decreases
Data Source
AI summary
In an electro-optical device, a torsion hinge and a mirror support post are formed as one piece together with a conductive member, and in the mirror support post, a first end portion on a substrate side is an open end which is opened toward the substrate. In the mirror support post, a second end portion on a mirror side is a flat plate which closes an opening of the mirror support post, and the mirror is in contact with a surface of the flat plate at a side opposite to the substrate. The first sacrificial layer which is used for manufacturing the electro-optical device is formed by exposure, development, and etching in a state in which a hard mask is formed, with respect to the photosensitive resin layer.