Misaligned Evaporator Condenser Trichlorosilane Vaporization
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Solution Overview
Problem
The continuous distillation-type trichlorosilane vaporization supply apparatus experiences high energy loss due to the condensation of trichlorosilane at low temperatures, leading to insufficient vaporization and reduced concentration of trichlorosilane-hydrogen mixed gas, which affects the growth rate and specific resistance of silicon epitaxial layers, and this is exacerbated by the need for increased apparatus size and cost to enhance heat transfer capabilities.
Innovation Solution
A continuous distillation-type trichlorosilane vaporization supply apparatus with an evaporator and condenser where the center lines are not aligned, featuring a precision temperature control mechanism and a pressure adjusting mechanism, allowing for efficient vaporization and condensation at a temperature corresponding to saturated vapor pressure, and a method to proportionally link the number of running devices to the temperature of liquid trichlorosilane in the evaporator, reducing energy consumption and apparatus size.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If the condenser is positioned directly above the evaporator with aligned center lines, then the apparatus structure is simple and compact, but the condensed trichlorosilane liquid drops directly on the evaporator causing instant temperature reduction and insufficient vaporization
Solution Approach 1:
The patent applies asymmetry by intentionally misaligning the center lines of the evaporator and condenser. The condenser is positioned offset from the evaporator's center line, preventing direct droplet impact on the heating surface while maintaining a compact vertical arrangement. This asymmetric positioning resolves the contradiction by preserving structural simplicity while eliminating the harmful temperature fluctuation effect.
2Productivity
If the temperature of trichlorosilane liquid in the evaporator is increased to prevent temperature drop, then the vaporized amount increases, but the apparatus size and cost increase due to larger heat transfer area requirements
Solution Approach 1:
The patent converts the harmful effect of condensed liquid dropping into a beneficial arrangement by positioning the condenser offset from the evaporator center. The condensed liquid now falls into the evaporator body without directly contacting the heated surface, utilizing the evaporator's internal volume as a collection zone. This eliminates the need for temperature compensation while maintaining compact apparatus size.
3Loss of energy
If the heat transfer area is increased to maintain vaporization rate, then the energy loss is reduced, but the apparatus size and manufacturing cost increase
Solution Approach 1:
The patent extracts the harmful direct-droplet-impact function from the evaporator-condenser system. By repositioning the condenser offset from the center line, the system separates the condensation function from the vaporization function spatially. This allows each component to operate independently at optimal conditions without requiring excessive heat transfer area, thereby reducing manufacturing costs while maintaining energy efficiency.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces energy costs, minimizes the size of the apparatus, and relaxes regulatory requirements by maintaining a stable trichlorosilane-hydrogen mixed gas concentration, ensuring efficient silicon epitaxial growth while lowering operational and installation costs.
Implementation Method 1
an evaporator which includes an introduction port for hydrogen gas as a carrier gas and has a heater that vaporizes liquid trichlorosilane
Implementation Method 2
a condenser which includes a cooling device that condenses liquid at a temperature corresponding to a saturated vapor pressure
Data Source
AI summary
A continuous distillation-type trichlorosilane vaporization supply apparatus includes an evaporator including an introduction port for hydrogen gas as a carrier gas and having a heater that vaporizes liquid trichlorosilane; and a condenser including a cooling device to condense liquid at a temperature corresponding to a saturated vapor pressure, which is lower than a vapor pressure of the vaporized trichlorosilane gas, wherein a center line of the evaporator and a center line of the condenser are not on the same line, and a lower end of the condenser has a structure that communicates with a lower end of the evaporator through a pipe.