Semiconductor Misalignment Sensor Bridge
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Semiconductor devices with misaligned layers face performance and reliability issues due to imprecision in fabrication, and existing methods for measuring misalignment are time-consuming and costly.
Innovation Solution
A misalignment sensor system that incorporates conductive layers with embedded electrodes and a sensing circuit, capable of nondestructive measurement of in-plane misalignment, which can be integrated into semiconductor devices with minimal additional area or circuits, using electrical properties such as capacitance or conductance to detect misalignment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional misalignment measurement methods are used, then measurement accuracy can be achieved, but the process is time-consuming and costly
Solution Approach 1:
The patent replaces traditional mechanical or optical measurement systems with an electrical sensing system. The misalignment sensor uses electrical fields and conductive layers to detect misalignment, substituting complex mechanical measurement apparatus with simpler electrical sensing that provides both accuracy and speed.
Solution Approach 2:
The misalignment sensor is integrated directly into the semiconductor device structure, allowing the device to self-measure its own misalignment. The conductive layers and electrodes are part of the device itself, eliminating the need for external measurement equipment and enabling fast, on-device measurement.
2Measurement precision
If complex measurement systems are implemented, then measurement capability is improved, but device complexity and cost increase
Solution Approach 1:
The patent merges the misalignment sensing function with the existing semiconductor device structure. The conductive layers used for sensing are integrated into the same layers that form the functional device, and the electrodes are combined with existing device components, eliminating the need for separate measurement systems.
Solution Approach 2:
The conductive layers serve dual purposes: they are part of the functional semiconductor device and simultaneously serve as sensing elements for misalignment detection. This multi-functionality reduces the need for additional components and maintains device simplicity while providing measurement capability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables fast, nondestructive, and accurate measurement of misalignment, improving the reliability and performance of semiconductor devices by identifying and monitoring misalignment issues early in the fabrication process.
Implementation Method 1
The one or more first electrodes and the one or more second electrodes forms at least a portion of a bridge structure that exhibits an electrical property that varies as a function of misalignment of the first conductive layer and the second conductive layer
Data Source
AI summary
The present disclosure relates to measuring misalignment between layers of a semiconductor device. In one embodiment, a device includes a first conductive layer; a second conductive layer; one or more first electrodes embedded in the first conductive layer; one or more second electrodes embedded in the second conductive layer; a sensing circuit connected to the one or more first electrodes; and a plurality of time-varying signal sources connected to the one or more second electrodes, wherein the one or more first electrodes and the one or more second electrodes form at least a portion of a bridge structure that exhibits an electrical property that varies as a function of misalignment of the first conductive layer and the second conductive layer in an in-plane direction.