Rotary Particle Separator Using Mist Agglomeration for PM Filtration
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Solution Overview
Problem
Existing exhaust gas filtration techniques for semiconductor manufacturing struggle to meet stringent air pollution control requirements by effectively reducing particulate matter (PM) concentration, particularly in semiconductor processing exhaust gases.
Innovation Solution
A particulate matter filtration apparatus utilizing a rotary particle separator that mixes exhaust gas with fluid mist to enhance agglomeration of PM particles, increasing their size for easier separation, and includes a mist generator, fans, and a hopper to improve filtration efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If existing exhaust PM filtration techniques are used, then the current PM mass concentration is maintained, but the stringent air pollution control requirements cannot be met
Solution Approach 1:
The patent applies preliminary action by agglomerating PM particles with liquid droplets before the main separation process. The rotary particle separator mixes exhaust gas with liquid mist to form agglomerated particles, which are then easier to separate. This pre-treatment step enables more effective filtration without requiring overly complex downstream equipment.
Solution Approach 2:
The patent uses liquid droplets as an intermediary substance to facilitate PM particle separation. The liquid mist acts as a mediator that binds to PM particles, increasing their effective size and making them more amenable to separation by the rotary particle separator. This intermediary approach achieves better filtration without directly complicating the core separation mechanism.
2Productivity
If PM particles are separated directly without agglomeration, then the filtration process is simpler, but the separation efficiency is insufficient to meet air pollution control requirements
Solution Approach 1:
The rotary particle separator performs preliminary agglomeration of PM particles with liquid droplets before separation. This pre-treatment increases particle size and improves separability, enabling higher productivity in the subsequent separation stage without requiring fundamentally more complex equipment.
Solution Approach 2:
The patent employs hydraulic principles by introducing liquid mist into the exhaust gas stream. The liquid droplets interact with PM particles through fluid dynamics, facilitating agglomeration. This pneumatic-hydraulic approach enhances separation efficiency using fluid mechanics rather than more complex mechanical separation systems.
3Manufacturing precision
If a rotary particle separator with mist generation is used, then PM agglomeration and separation efficiency improve, but the device complexity increases
Solution Approach 1:
The rotary particle separator performs multiple functions: it generates liquid mist, agglomerates PM particles with the mist, and separates the agglomerated particles from exhaust gas. By combining these functions in a single device, the patent achieves high PM filtration performance without proportionally increasing overall system complexity.
Solution Approach 2:
The patent merges the mist generation, particle agglomeration, and particle separation functions into an integrated rotary particle separator. This consolidation achieves effective PM filtration while avoiding the need for separate independent systems for each function, thereby limiting the increase in device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus enhances PM filtration performance by enlarging PM particles through agglomeration with fluid mist, allowing for more effective separation and reduced PM mass concentration in semiconductor fabrication exhaust gases.
Implementation Method 1
mixes exhaust gas with liquid mist to enhance agglomeration of PM particles, increasing their size for easier separation
Implementation Method 2
rotary particle separator that mixes exhaust gas with liquid mist to enhance agglomeration of PM particles
Data Source
AI summary
A particle separator includes: a mist dispenser adapted to provide a mist; and a first fan adapted to clean an exhaust gas. The first fan includes: an outer mesh member; an inner mesh member laterally surrounded by the outer mesh member and defining a central chamber of the particle separator; and a plurality of blades arranged between the outer mesh member and the inner mesh member. The plurality of blades are adapted to rotate about the central chamber.