Film Forming Apparatus Mist Spray Nozzle Clogging Prevention

The spray nozzle is divided into multiple functional parts: a spray hole formation part with spray orifices for material ejection, and a separate raw material introduction part with introduction holes that do not directly contact the spray orifices. This segmentation prevents particles generated in the raw material introduction path from reaching and clogging the spray orifices.

The harmful function of particle generation is extracted and isolated to a specific region (the raw material introduction part) that is separated from the spray hole formation part. Particles are generated and trapped in the introduction holes rather than being carried to the spray orifices, effectively removing the clogging problem from the spray function.

The nozzle structure separates the raw material introduction function from the spray ejection function. The raw material discharge part introduces material through holes in the cavity wall away from the bottom, while spray orifices are formed separately in the bottom surface. This segmentation allows the discharge part to be positioned optimally for material introduction without being susceptible to particle attachment that would occur if it were at the bottom.

The cavity structure acts as an intermediary chamber that receives raw material through introduction holes from the raw material discharge part, then delivers it to the spray orifices in the bottom surface. This intermediary space allows particle-laden raw material to be processed and delivered without the discharge part itself being exposed to conditions that cause particle attachment and clogging.