Mist-Trapping Unit for Stable Meniscus Control in Substrate Processing

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Solution Overview

Problem

Existing substrate processing apparatuses face challenges in stably controlling the meniscus position due to mist generation, which can lead to malfunction of pressure control units and interlock sensors, affecting the accuracy of ink discharge.

Innovation Solution

Incorporation of a trap unit between the reservoir and pressure control unit to capture and liquefy mist generated by the reservoir, using a network of lines and trap layers to extend the mist's path and lower its temperature, preventing it from reaching the pressure control unit.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a reservoir is used to store and supply ink, then ink supply is maintained, but mist is generated that can reach the pressure control unit and cause malfunction

Engineering Contradiction:

Improvepressure control unit operationVSAvoidmist generation

Core Design Contradiction:

ReliabilityVSObject-generated harmful factors

Solution Approach 1:

A trap unit is introduced as an intermediary component between the reservoir and pressure control unit. This trap unit captures mist generated by the reservoir before it can reach the pressure control unit, preventing malfunction while maintaining ink supply functionality.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The harmful mist is extracted and separated from the ink supply system using the trap unit. The trap unit specifically removes mist from the gas phase while allowing liquid ink to pass through to the pressure control unit.

Inventive Principle:

Principle #2Taking out (Extraction)

2Reliability

If the trap unit uses multiple lines and trap layers, then mist trapping effectiveness is improved, but device complexity increases

Engineering Contradiction:

Improvemist trapping effectivenessVSAvoidtrap unit structure

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The trap unit is segmented into multiple functional components including first and second lines, first and second trap layers, and a third line for drainage. Each segment performs a specific function in the mist trapping process, improving overall effectiveness while maintaining modular simplicity.

Inventive Principle:

Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Stable operation of the pressure control unit is maintained, reducing the risk of malfunction and ensuring accurate meniscus control, thereby improving the reliability of ink discharge.

Implementation Method 1

a trap unit disposed between the reservoir and the pressure control unit and configured to trap a mist generated by the reservoir

Methodology Applied

Scientific EffectCondensation: Condensation

Implementation Method 2

using a network of lines and trap layers to extend the mist's path and lower its temperature

Methodology Applied

Scientific EffectCooling: Cooling

Data Source

PatentUS12403696B2Trap device and substrate processing apparatus comprising the same

Publication Date: 2025.09.02 SYSTEM ENGINEERING MEGA SOLUTION CO LTD

AI summary

The present disclosure provides a substrate processing apparatus capable of stably controlling a meniscus position. The substrate processing apparatus comprises a head unit configured to discharge a medical fluid; a reservoir configured to store the medical fluid and supply the medical fluid to the head unit; a pressure control unit configured to control pressure in the reservoir; and a trap unit disposed between the reservoir and the pressure control unit and configured to trap a mist generated by the reservoir.