Mixed Gas Supply Apparatus Pressure-Driven Replenishment
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Solution Overview
Problem
Existing methods for supplying mixed gases in high-pressure states for surface processing, such as in semiconductor manufacturing, face issues like low-pressure supply, impurity intrusion, gas leaks, wasteful gas discard, and interrupted supply due to the operation of booster pumps and compressors, as well as inefficient pressure management in mixing containers.
Innovation Solution
A method and apparatus that replenish a mixing container with a mixed gas in a high-pressure state by using a replenishment container with a high-vapor-pressure gas to force out a low-vapor-pressure gas, ensuring continuous supply without interruption, while minimizing gas waste and impurity intrusion, by maintaining specific capacity and diameter ratios between the replenishment and mixing containers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stress or pressure
If a booster pump or compressor is used to mix and supply low-vapor-pressure and high-vapor-pressure gases, then high-pressure mixed gas supply is achieved, but impurity intrusion and gas leaks occur easily
Solution Approach 1:
The invention extracts the problematic booster pump and compressor from the system and replaces them with a direct pressure-driven mixing mechanism. The high-vapor-pressure gas naturally forces out the low-vapor-pressure gas from the replenishment container into the mixing container through pressure differential alone, eliminating mechanical components that cause impurity intrusion and leaks.
Solution Approach 2:
The invention introduces a replenishment container as an intermediary device between the gas sources and the mixing container. This intermediary allows pressure-driven gas transfer without requiring direct mechanical pumping, thereby maintaining gas purity while achieving the desired mixing and pressure elevation.
2Stress or pressure
If the mixing container pressure is reduced to supply point pressure, then gas supply is achieved, but the remaining mixed gas must be discarded with a vacuum pump
Solution Approach 1:
The invention performs preliminary action by pre-charging the replenishment container with low-vapor-pressure gas before the mixing container needs replenishment. When the mixing container pressure drops, the pre-charged replenishment container automatically forces its gas into the mixing container, eliminating the need to discard remaining gas and avoiding vacuum pump operation.
Solution Approach 2:
The invention ensures continuity of useful action by maintaining a pre-charged replenishment container ready to immediately replenish the mixing container when needed. This continuous readiness eliminates interruptions in gas supply and prevents the waste associated with discarding remaining gas during pressure equalization.
3Reliability
If a vacuum pump is used to discard remaining mixed gas and recharge the mixing container, then the mixing container can be replenished, but the process is time-consuming and supply must be stopped
Solution Approach 1:
The invention replaces the mechanical vacuum pump system with a pressure-driven gas transfer mechanism. The high-vapor-pressure gas naturally forces out the low-vapor-pressure gas through pressure differential, eliminating the need for vacuum pumps and enabling rapid replenishment without stopping supply.
Solution Approach 2:
The invention uses pneumatic pressure differential between the replenishment container (high vapor pressure gas) and the mixing container to drive the gas transfer process. This pneumatic mechanism enables rapid replenishment without mechanical vacuum pumps, maintaining supply continuity and improving productivity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables the continuous, uninterrupted supply of high-pressure mixed gases to the use point, reduces gas waste, and minimizes impurity intrusion, while optimizing the design for efficient operation and reduced installation space.
Implementation Method 1
charging a predetermined amount of the first gas into a replenishment container which is connected to the mixing container by a replenishment line having a replenishment valve, and which is evacuated, and charging the second gas into the replenishment container charged with the first gas and simultaneously opening the replenishment valve to cause the first gas in the replenishment container to be forced out by the second gas
Data Source
AI summary
A method and apparatus, for supplying high-pressure mixed gas of a low-vapor-pressure first gas as an active gas and a high-vapor-pressure second gas, are arranged to reduce an amount of the first gas discarded. The mixed gas in a high-pressure state is supplied from a mixing container to a use point. Upon reduction of pressure in the mixing container to a setpoint as a result of supply to the use point, a predetermined amount of the first gas is charged into a replenishment container connected to the mixing container by a replenishment line having a replenishment valve, and which is evacuated. As the second gas is charged into the replenishment container charged with the first gas, the replenishment valve is opened such that the first gas in the replenishment container is forced out by the second gas, thereby charging the mixing container with the mixed gas in the high-pressure condition.