Mixed-Height Logic Cell Layout for Power-Speed Tradeoffs

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Solution Overview

Problem

The miniaturization of integrated circuits (ICs) has led to challenges in balancing high-speed functionality with power consumption and production yield, particularly in ensuring efficient signal control and processing while maintaining performance.

Innovation Solution

The use of dual-fin FETs in high-speed logic cells and single-fin FETs in non-speed-critical cells within the same IC array, along with specific transistor configurations and metal line arrangements, to optimize cell performance and reduce power consumption.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If dual-fin FETs are used in high-speed logic cells, then cell performance and drive current are improved, but power consumption and manufacturing complexity increase

Engineering Contradiction:
Improvecell performanceVSAvoidpower consumption
Core Design Contradiction:
SpeedVSUse of energy by moving object

Solution Approach 1:

The patent applies different FET configurations (dual-fin vs. single-fin) to different logic cells based on their specific performance requirements. High-speed logic cells use dual-fin FETs to achieve higher drive current and performance, while non-critical cells use single-fin FETs to reduce power consumption and complexity. This localized differentiation resolves the contradiction by optimizing each cell's power-performance tradeoff independently.

Inventive Principle:
Principle #3Local quality

2Power

If dual-fin FETs are used in high-speed logic cells, then drive current is improved, but device complexity increases

Engineering Contradiction:
Improvedrive currentVSAvoidtransistor configuration
Core Design Contradiction:
PowerVSDevice complexity

Solution Approach 1:

The patent implements local quality by assigning dual-fin FETs only to high-speed logic cells where high drive current is critical, while using simpler single-fin FETs in other cells. This selective approach maintains high performance where needed while minimizing overall device complexity across the entire IC array.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The IC array is segmented into different types of logic cells (high-speed vs. non-high-speed) with different FET configurations. This segmentation allows the system to manage complexity by dividing the device into functional zones with appropriately optimized transistor structures for each zone's requirements.

Inventive Principle:
Principle #1Segmentation

3Adaptability or versatility

If different cell heights are used in the IC array, then performance optimization is improved, but manufacturing precision requirements increase

Engineering Contradiction:
Improveperformance optimizationVSAvoidcell height variation
Core Design Contradiction:
Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The patent employs different cell heights (first cell height for high-speed cells, second cell height for other cells) to optimize performance for different functional requirements. The manufacturing process is specifically designed to accommodate these predetermined height differences through controlled formation of insulation regions and conductor patterns at different elevations, thus managing precision requirements while achieving local optimization.

Inventive Principle:
Principle #3Local quality

Data Source

PatentUS11916055B2Semiconductor structure having logic cells with multiple cell heights
Publication Date: 2024.02.27 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US11916055B2 patent drawing
  • US11916055B2 patent drawing
  • US11916055B2 patent drawing

AI summary

Semiconductor structures are provided. A semiconductor structure includes a plurality of first logic cells having a first cell height, a plurality of second logic cells having a second cell height, and a plurality of metal lines parallel to each other in a metal layer. The second cell height is different than the first cell height. The first logic cells are arranged in odd rows of a cell array, and the second logic cells are arranged in even rows of the cell array. The metal lines covering the first and second logic cells are wider than the metal lines inside the first logic cells, and the metal lines inside the first logic cells are wider than the metal lines inside the second logic cells.