Mixed-Height Nanoribbon Cell Rows for Lower Parasitic Capacitance

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Solution Overview

Problem

In integrated circuit design, maximizing space while minimizing parasitic effects becomes challenging as devices and unit cells shrink, leading to inefficiencies in transistor layout and increased parasitic capacitance, which degrades performance.

Innovation Solution

The approach involves forming rows of cells with varying heights and nanoribbon widths, where some rows have a height at least 3 nm shorter than others, allowing for differently sized semiconductor bodies and optimized gate area usage, thereby reducing wasted space and parasitic capacitance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If standard unit cell libraries with fixed transistor configurations are used, then design simplicity is maintained, but space utilization efficiency deteriorates and parasitic effects increase

Engineering Contradiction:
Improvedesign simplicityVSAvoidspace utilization efficiency
Core Design Contradiction:
Ease of manufactureVSArea of stationary object

Solution Approach 1:

The patent segments the unit cell library into multiple cell types with different heights (first cell type with height H1, second cell type with height H2) and different nanoribbon widths. This segmentation allows selective placement of appropriately sized cells to match the specific transistor requirements, optimizing space utilization while maintaining design flexibility through standardized cell modules.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent applies local quality by assigning different cell characteristics (height, nanoribbon width) to different locations in the circuit layout based on specific functional requirements. Each cell type is optimized for its particular application, with taller cells used where larger transistor areas are needed and shorter cells used where compact layouts are prioritized, thereby optimizing overall space utilization.

Inventive Principle:
Principle #3Local quality

2Area of stationary object

If device sizes are reduced to maximize density, then area efficiency improves, but parasitic capacitance increases and performance degrades

Engineering Contradiction:
Improvearea efficiencyVSAvoidparasitic capacitance
Core Design Contradiction:
Area of stationary objectVSObject-generated harmful factors

Solution Approach 1:

The patent changes the parameter of cell height to optimize the balance between area efficiency and parasitic capacitance. By providing cell types with different heights (H1, H2) and different nanoribbon widths, the design can select appropriate parameters for each location, ensuring that devices are sized appropriately rather than uniformly miniaturized, thus reducing parasitic effects while maintaining area efficiency.

Inventive Principle:
Principle #35Parameter changes

3Manufacturing precision

If uniform cell heights are used across all rows, then manufacturing consistency is improved, but gate area optimization deteriorates due to wasted space

Engineering Contradiction:
Improvemanufacturing consistencyVSAvoidgate area optimization
Core Design Contradiction:
Manufacturing precisionVSArea of stationary object

Solution Approach 1:

The patent segments the cell population into distinct types with different heights, each type being manufactured with consistent dimensions. This segmentation allows manufacturing processes to maintain precision for each cell type while the overall circuit benefits from optimized gate area utilization through selective placement of appropriately sized cells.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent creates a universal cell library where different cell types can be used across multiple locations depending on requirements. Each cell type serves multiple functions (different transistor counts, different area requirements) while maintaining manufacturing consistency through standardized fabrication processes for each cell type.

Inventive Principle:
Principle #6Universality (Multi-functionality)

4Productivity

If larger nanoribbon widths are used, then transistor performance improves, but area consumption increases and density decreases

Engineering Contradiction:
Improvetransistor performanceVSAvoidarea consumption
Core Design Contradiction:
ProductivityVSArea of stationary object

Solution Approach 1:

The patent applies local quality by varying nanoribbon widths at different locations based on performance requirements. Critical path transistors or high-performance requirements locations receive larger nanoribbon widths for improved performance, while non-critical locations use smaller nanoribbon widths to minimize area consumption, optimizing the overall density-performance balance.

Inventive Principle:
Principle #3Local quality

Data Source

PatentEP4485519A1Cell rows with mixed heights and mixed nanoribbon widths
Publication Date: 2025.01.01 INTEL CORP
  • EP4485519A1 patent drawingFigure 1A
  • EP4485519A1 patent drawingFigure 1B
  • EP4485519A1 patent drawingFigure 2A~2B

AI summary

Techniques are described for designing and forming cells comprising transistor devices for an integrated circuit. An integrated circuit structure includes a plurality of cells arranged in rows where some rows have different cell heights compared to other rows. Additionally, the various rows of cells contain semiconductor nanoribbons having different widths between different rows. For example, any number of first rows of cells can each have a first height (h1) and any number of second rows can each have a second height (h2) that is smaller than the first height. The first rows of cells may include transistors with semiconductor nanoribbons having a first width (w1) and the second rows of cells may include transistors with semiconductor nanoribbons having a second width (w2) smaller than the first width. In some cases, any of the first rows of cells may also include transistors with semiconductor nanoribbons having the second width.