Multilayer Ceramic Capacitor TiN Electrode Uniformity

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Solution Overview

Problem

Conventional multilayer ceramic capacitors (MLCCs) face challenges in achieving a high effective volume ratio due to non-uniform external electrode thickness, with thin electrodes at corners and thick electrodes elsewhere, and suffer from reliability issues when a plating layer penetrates the body, reducing moisture resistance.

Innovation Solution

A multilayer ceramic capacitor design featuring a thin, dense primary electrode layer made of titanium nitride (TiN) formed using atomic layer deposition (ALD), with a second electrode layer and a method of manufacturing that includes forming TiN on the entire surface and etching exposed portions to ensure uniformity and prevent moisture penetration.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If the dipping method is used to form external electrodes, then the manufacturing process is simple, but the external electrode thickness is non-uniform (thin at corners, thick elsewhere), reducing effective volume ratio

Engineering Contradiction:

Improvemanufacturing process simplicityVSAvoidexternal electrode thickness uniformity

Core Design Contradiction:

Ease of manufactureVSManufacturing precision

Solution Approach 1:

The patent replaces the mechanical dipping method with a chemical vapor deposition (CVD) process to form the titanium nitride layer. This substitution enables precise control over layer thickness and uniformity across the entire electrode surface, including corner regions, thereby resolving the thickness non-uniformity issue while maintaining manufacturing feasibility

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the deposition parameters by using CVD with controlled temperature, pressure, and gas flow rates to deposit titanium nitride. By optimizing these parameters, the process achieves uniform thin layer formation (5-50 nm) across complex geometries, solving the thickness control problem inherent in the dipping method

Inventive Principle:

Principle #35Parameter changes

2Manufacturing precision

If external electrodes are made thin to increase effective volume ratio, then capacity increases, but moisture resistance reliability deteriorates

Engineering Contradiction:

Improveeffective volume ratioVSAvoidmoisture resistance

Core Design Contradiction:

Manufacturing precisionVSReliability

Solution Approach 1:

The patent creates a composite electrode structure consisting of a titanium nitride layer deposited on the external electrode. This composite structure provides both the thin profile needed for high effective volume ratio and the moisture barrier properties required for reliability, as titanium nitride is inherently resistant to moisture penetration

Inventive Principle:

Principle #40Composite materials

Solution Approach 2:

The titanium nitride layer acts as an intermediary between the external electrode and the environment. This intermediate layer provides moisture resistance while allowing the external electrode itself to remain thin, thus enabling both high effective volume ratio and reliable moisture protection

Inventive Principle:

Principle #24Intermediary (Mediator)

3Reliability

If a plating layer is formed to improve connectivity and mountability, then electrical performance improves, but plating solution penetrates into the body, reducing reliability

Engineering Contradiction:

Improveconnectivity and mountabilityVSAvoidplating solution penetration

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent applies the titanium nitride coating to the external electrode before the plating process. This preliminary protective layer prevents plating solution from penetrating into the capacitor body during subsequent plating operations, while still allowing the plating layer to be formed for improved connectivity and mountability

Inventive Principle:

Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution ensures sufficient moisture resistance reliability and enhances the effective volume ratio by securing connectivity between internal and external electrodes, while maintaining reliability even with thin external electrodes.

Implementation Method 1

forming a first electrode layer including titanium nitride (TiN) on the entire surface of the body using an atomic layer deposition (ALD) method

Methodology Applied

Scientific EffectAtomic layer deposition: Deposition (physical)

Data Source

PatentUS10726996B2Multilayer ceramic capacitor and method of manufacturing the same

Publication Date: 2020.07.28 SAMSUNG ELECTRO MECHANICS CO LTD

AI summary

A multilayer ceramic capacitor includes a body including a dielectric layer and internal electrodes with external electrodes disposed on one surface of the body, wherein the external electrodes include a first electrode layer disposed on one surface of the body, in contact with the internal electrodes, and including titanium nitride (TiN), and a second electrode layer disposed on the first electrode layer.