MnGa-N Perpendicular Magnetic Layer for High Anisotropy and Flatness

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Solution Overview

Problem

Existing perpendicular magnetic materials face challenges in achieving high magnetic anisotropy energy density, low magnetic damping, and flatness necessary for high-density magnetic storage and memory devices, particularly in magnetic tunnel junctions, due to issues with noble metal costs and material formation difficulties.

Innovation Solution

A MnGa alloy with a small nitrogen content is used to form a perpendicular magnetic layer with a D022 or L10 crystal structure, achieving high magnetic anisotropy energy density and flatness through a reactive sputtering method, and incorporating germanium instead of gallium to maintain these properties.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If cobalt-based alloy materials or L10-type iron-platinum alloy are used as perpendicular magnetic layers, then high magnetic anisotropy energy density is achieved, but cost increases due to noble metal content and magnetic damping increases

Engineering Contradiction:
Improvemagnetic anisotropy energy densityVSAvoidmagnetic damping
Core Design Contradiction:
StrengthVSLoss of energy

Solution Approach 1:

The patent replaces expensive noble metal-based perpendicular magnetic materials (Co-Pt-Cr alloy, L10-type FePt alloy) with a manganese-gallium-nitrogen alloy that does not contain noble metals. This substitution significantly reduces material cost while maintaining the necessary magnetic properties for high-density recording applications.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

Solution Approach 2:

The patent introduces nitrogen into the manganese-gallium alloy to form a Mn-Ga-N compound with a specific composition ratio (0 < x ≤ 0.5 in (Mn1-xMx)Ny). This compositional parameter change enables the material to achieve both high magnetic anisotropy energy density and low magnetic damping, resolving the contradiction between these two properties.

Inventive Principle:
Principle #35Parameter changes

2Loss of energy

If manganese-gallium alloy is used as perpendicular magnetic layer, then magnetic damping is reduced and noble metals are eliminated, but layer flatness deteriorates making it difficult to form high-quality magnetic recording medium

Engineering Contradiction:
Improvemagnetic dampingVSAvoidlayer flatness
Core Design Contradiction:
Loss of energyVSManufacturing precision

Solution Approach 1:

The patent introduces nitrogen into the manganese-gallium alloy to form Mn-Ga-N compound with controlled composition (0 < x ≤ 0.5). This compositional modification fundamentally changes the material's properties, enabling it to form flat layers with high manufacturing precision while maintaining low magnetic damping and eliminating noble metals.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent creates a composite Mn-Ga-N alloy material that combines manganese, gallium, and nitrogen in specific proportions. This composite material exhibits superior properties compared to simple Mn-Ga alloy, achieving both flat layer formation and low magnetic damping simultaneously.

Inventive Principle:
Principle #40Composite materials

3Manufacturing precision

If homogeneous manganese-gallium-nitrogen layer with cubic system structure is formed by introducing nitrogen, then very flat layer is obtained, but magnetic anisotropy energy density decreases to a fraction of D022-type MnGa alloy

Engineering Contradiction:
Improvelayer flatnessVSAvoidmagnetic anisotropy energy density
Core Design Contradiction:
Manufacturing precisionVSStrength

Solution Approach 1:

The patent carefully controls the nitrogen content and composition ratio (0 < x ≤ 0.5 in (Mn1-xMx)Ny) to prevent formation of the cubic E21-type Mn3GaN structure. By maintaining this specific compositional range, the material forms a tetragonal D022-type structure that simultaneously achieves flat layer morphology and high magnetic anisotropy energy density, avoiding the trade-off present in highly nitrogenated cubic structures.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The approach results in a perpendicular magnetic layer with high magnetic anisotropy energy density, low saturation magnetization, and improved flatness, suitable for high-density magnetic recording and reduced power consumption in magnetic tunnel junctions.

Implementation Method 1

a perpendicular magnetic layer may be formed using this layer by a reactive sputtering method

Methodology Applied
Scientific EffectSputtering: Sputtering

Data Source

PatentUS10395809B2Perpendicular magnetic layer and magnetic device including the same
Publication Date: 2019.08.27 SAMSUNG ELECTRONICS CO LTD
  • US10395809B2 patent drawing
  • US10395809B2 patent drawing
  • US10395809B2 patent drawing

AI summary

Embodiments of the inventive concepts provide a flat perpendicular magnetic layer having a low saturation magnetization and a perpendicular magnetization-type tunnel magnetoresistive element using the same. The perpendicular magnetic layer is a nitrogen-poor (Mn1−xGax)Ny layer (0&lt;x≤0.5 and 0&lt;y&lt;0.1) formed by providing nitrogen (N) into a MnGa alloy while adjusting a nitrogen amount. The perpendicular magnetic layer can be formed flat.