Mobile Consumable Part Replacement for Vacuum Processing Tools

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Solution Overview

Problem

The replacement of consumable parts in processing devices requires opening the device to the atmosphere, leading to increased processing stop time and potential inefficiencies due to manual handling of large-sized parts, and existing replacement stations increase the system's installation area.

Innovation Solution

A system comprising a part storage device and a replacement device that moves to the processing device to replace consumable parts without opening the processing device to the atmosphere, using robotic mechanisms to facilitate quick and efficient part replacement while minimizing system size.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If manual replacement of consumable parts is performed by opening the processing device to the atmosphere, then the consumable part can be replaced, but the processing stop time increases and manual handling of large-sized parts becomes inefficient

Engineering Contradiction:
Improveconsumable part replacementVSAvoidprocessing stop time
Core Design Contradiction:
Ease of operationVSLoss of time

Solution Approach 1:

The replacement device performs consumable part replacement autonomously without requiring manual operation. The device includes a holder that grasps the consumable part, a mover that positions the holder, and a remover that detaches the consumable part from the processing device, enabling self-service replacement that reduces processing stop time

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

Manual mechanical handling of consumable parts is replaced with an automated mechanical system consisting of a holder, mover, and remover. This substitution eliminates manual labor requirements and enables faster, more consistent replacement operations while maintaining the processing device sealed

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Loss of time

If a replacement station with a replacement handler is used to replace consumable parts in vacuum, then processing stop time is reduced, but the system installation area increases

Engineering Contradiction:
Improveprocessing stop timeVSAvoidsystem installation area
Core Design Contradiction:
Loss of timeVSArea of stationary object

Solution Approach 1:

The replacement device is designed as a mobile unit with a mover that can transport the holder to and from the processing device. This dynamic design allows the replacement functionality to be provided on-demand rather than requiring a permanently installed replacement station, thereby reducing system installation area while maintaining fast replacement capability

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The holder is designed to be able to hold different types of consumable parts, and the replacement device can service multiple processing devices. This multi-functionality reduces the need for dedicated replacement stations for each processing device, thereby reducing overall system installation area

Inventive Principle:
Principle #6Universality (Multi-functionality)

Data Source

PatentUS20250332675A1Part replacement system and part replacement device
Publication Date: 2025.10.30 TOKYO ELECTRON LTD
  • US20250332675A1 patent drawing
  • US20250332675A1 patent drawing
  • US20250332675A1 patent drawing

AI summary

A part replacement system includes a part storage device configured to store an unused consumable part, and a replacement device that is connected to a processing device and the part storage device, the replacement device being configured to replace a used consumable part installed in the processing device with the unused consumable part stored in the part storage device. The replacement device is moved to a position of the processing device having the used consumable part that requires replacement, and the replacement device is connected to the processing device, and the part storage device is moved to a position of the replacement device connected to the processing device having the used consumable part that requires replacement, and the part storage device is connected to the replacement device.