Mode Scrambler for Laser Light Source Angular Homogeneity

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Solution Overview

Problem

Laser-operated light sources often suffer from insufficient angular homogeneity, which negatively impacts the quality of light delivered to downstream processes like spectroscopy and surface inspection, leading to inhomogeneous light distribution and reduced optical quality.

Innovation Solution

The implementation of mode scramblers, specifically configured to bend optical fibers to different bend radii, improves the angular homogeneity of light by inducing mode mixing and uniformity across a range of angles, using either winding devices or clamping devices to create alternating curvatures, and employing additional optical fibers with larger diameters for enhanced homogenization.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Illumination intensity

If conventional optical fiber coupling is used to transfer light from the laser-operated light source, then the light transfer is simple and direct, but the angular homogeneity of the light is insufficient and inhomogeneous light distribution occurs

Engineering Contradiction:
Improveangular homogeneityVSAvoidoptical system complexity
Core Design Contradiction:
Illumination intensityVSDevice complexity

Solution Approach 1:

The patent introduces mode scramblers as intermediary devices between the optical fiber and the light delivery system. These mode scramblers mix the optical modes within the fiber to transform the angular distribution of light, thereby improving angular homogeneity without requiring fundamental changes to the light source or coupling mechanism.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent employs mode scramblers that dynamically change the optical parameters (mode distribution, angular distribution) of the light within the fiber. By actively manipulating these parameters through controlled fiber bending or mechanical elements, the system achieves improved angular homogeneity while maintaining a relatively simple overall structure.

Inventive Principle:
Principle #35Parameter changes

2Illumination intensity

If mode scramblers are introduced to improve angular homogeneity, then light distribution uniformity improves, but device complexity increases

Engineering Contradiction:
Improvelight distribution uniformityVSAvoidoptical component complexity
Core Design Contradiction:
Illumination intensityVSDevice complexity

Solution Approach 1:

The patent divides the light delivery function into separate components: the optical fiber for light transfer and the mode scrambler for homogenization. This segmentation allows each component to be optimized independently, with the mode scrambler being a relatively simple add-on device that can be implemented through basic mechanical elements like bending fixtures or clamping mechanisms.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The mode scramblers described in the patent can be implemented using simple, low-cost mechanical elements such as bending fixtures, clamping devices, or even temporary fiber manipulations. These elements do not require complex active control systems or expensive components, making them cost-effective solutions for improving light homogeneity.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach significantly enhances the angular and surface homogeneity of light, reducing negative impacts on measuring processes and improving the optical quality, particularly in the semiconductor industry, while using cost-effective and simple components.

Implementation Method 1

at least one mode scrambler assigned to the optical fiber and the optical fibers

Methodology Applied
Scientific EffectMode mixing:

Implementation Method 2

a laser for inputting laser energy into the plasma such that, under the impact of the laser radiation, the plasma generates useful light

Methodology Applied
Scientific EffectLaser radiation: Laser

Implementation Method 3

the plasma, in response to being irradiated with laser radiation, can emit radiation

Methodology Applied
Scientific EffectPlasma emission: Plasma

Implementation Method 4

an ignition source for ionizing the gas in the chamber for generating a plasma

Methodology Applied
Scientific EffectIonization: Ionisation

Implementation Method 5

the ignition source can be formed by means of an electrode pair

Methodology Applied
Scientific EffectElectrical discharge: Electric Arc

Data Source

PatentEP2851934B1Laser-Driven Light Source
Publication Date: 2022.11.16 ASML NETHERLANDS BV
  • EP2851934B1 patent drawingFigure 1
  • EP2851934B1 patent drawingFigure 2
  • EP2851934B1 patent drawingFigure 3

AI summary

A laser-driven light source encompasses a chamber for accommodating an ionizable gas and an ignition source for ionizing the gas in the chamber for generating a plasma. The light source furthermore encompasses a laser for inputting laser energy into the plasma such that, under the impact of the laser radiation, the plasma emits useful light, which forms the output signal of the light source, wherein provision is made for means for coupling the useful light into a transferring optical fiber. In the case of the light source according to the invention, at least one mode scrambler is assigned to the optical fiber or the optical fibers.