Modular Atomic Force Microscope Environmental Sealing

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Solution Overview

Problem

Current scanning probe microscopes (SPMs) and atomic force microscopes (AFMs) face challenges in achieving high-resolution, noise-free measurements at video rate imaging speeds due to limitations in probe design, environmental control, and temperature management, particularly when using smaller, high resonant frequency probes, which result in distortion and thermal errors.

Innovation Solution

The use of a rolling diaphragm for sealing the probe and sample, combined with advanced temperature control methods and passive heat dissipation designs, allows for improved environmental isolation and reduced scan distortion, enabling higher resolution and faster imaging while minimizing thermal errors.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If smaller, high resonant frequency probes are used to achieve faster imaging speeds, then imaging speed is improved, but mechanical distortion and thermal errors increase

Engineering Contradiction:
Improveimaging speedVSAvoidmeasurement precision
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The system is divided into separate modular components including the probe module, sample stage module, and environmental control module. This segmentation allows independent optimization of each module - enabling the use of smaller, high-frequency probes for fast imaging while separately implementing precision correction mechanisms to address the resulting mechanical distortion and thermal errors.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent implements active compensation by dynamically adjusting system parameters to counteract distortion. Temperature control parameters are optimized to minimize thermal expansion effects, and mechanical alignment parameters are continuously corrected to compensate for the increased distortion inherent in high-speed imaging with smaller probes.

Inventive Principle:
Principle #35Parameter changes

2Manufacturing precision

If environmental controls are added to reduce thermal errors, then measurement precision is improved, but device complexity increases

Engineering Contradiction:
Improvemeasurement precisionVSAvoiddevice complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The environmental control chamber serves multiple functions simultaneously: it provides thermal isolation to reduce thermal errors, maintains controlled humidity levels, and creates a stable mechanical environment. This multi-functionality allows precision improvement without proportionally increasing complexity, as a single integrated chamber addresses multiple sources of measurement error.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent introduces an intermediary environmental control chamber that acts as a buffer between the external environment and the measurement system. This intermediary layer isolates the sensitive probe and sample from external thermal fluctuations and mechanical vibrations, reducing measurement errors without requiring direct modification of the probe or sample handling mechanisms.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Stability of the object's composition

If the probe and sample are sealed to improve environmental isolation, then thermal stability is improved, but mechanical distortion may occur

Engineering Contradiction:
Improvethermal stabilityVSAvoidscan distortion
Core Design Contradiction:
Stability of the object's compositionVSManufacturing precision

Solution Approach 1:

The patent employs flexible sealing membranes that can accommodate differential thermal expansion between the internal chamber environment and external surroundings. These flexible films maintain the sealed, thermally stable environment while allowing controlled expansion and contraction, thereby preventing the buildup of mechanical stresses that would cause scan distortion.

Inventive Principle:
Principle #30Flexible shells and thin films

Solution Approach 2:

The system is designed with deliberate consideration of thermal expansion effects. The sealed chamber is constructed from materials with matched thermal expansion coefficients, and expansion compensation mechanisms are built into the mechanical structure. This allows the chamber to be sealed for thermal stability while accommodating the natural thermal expansion that occurs, preventing distortion of the scan geometry.

Inventive Principle:
Principle #37Thermal expansion

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances the ability to achieve high-resolution, noise-free measurements at video rate speeds by reducing mechanical distortion and thermal errors, allowing for precise imaging in various environments and temperatures.

Implementation Method 1

a rolling diaphragm for sealing the probe and sample

Methodology Applied
Scientific EffectPhysical Containment: Physical Containment

Implementation Method 2

passive heat dissipation designs

Methodology Applied
Scientific EffectThermal Radiation: Thermal Radiation

Implementation Method 3

passive heat dissipation designs

Methodology Applied
Scientific EffectConvection: Convection

Data Source

PatentUS10416190B2Modular atomic force microscope with environmental controls
Publication Date: 2019.09.17 OXFORD INSTR ASYLUM RES INC
  • US10416190B2 patent drawing
  • US10416190B2 patent drawing
  • US10416190B2 patent drawing

AI summary

A modular Atomic Force Microscope that allows ultra-high resolution imaging and measurements in a wide variety of environmental conditions is described. The instrument permits such imaging and measurements in environments ranging from ambient to liquid or gas or extremely high or extremely low temperatures.