Modular Beam-Directing Optics for Polarization-Stable Ellipsometry

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Solution Overview

Problem

Existing ellipsometer systems lack the ability to easily switch between different beam directing systems without significantly altering the polarization state of electromagnetic radiation, and there is a need for a system that can be retrofitted to existing systems to provide multiple beam directing options with minimal impact on polarization.

Innovation Solution

A system comprising multiple beam directing systems, including total internal reflection prisms, beam folding optics, and beam focusing optics, which can be sequentially deployed to direct electromagnetic beams at various angles of incidence while preserving polarization, and a method for calibrating and testing these systems by regressing mathematical models on data sets obtained from different configurations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If multiple beam directing systems are integrated into an ellipsometer system, then the versatility and adaptability of the system is improved, but the device complexity increases

Engineering Contradiction:

Improvebeam directing optionsVSAvoidsystem structure

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The ellipsometer system is divided into separate, modular beam directing systems (collimated beam system and focused beam system) that can be independently configured and switched. Each subsystem handles specific beam types, allowing the overall system to offer multiple options without creating an unmanageable complex structure.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The ellipsometer system is designed with universal beam directing capabilities that can handle both collimated and focused beams through different optical paths. The system uses common components (source, detector, sample stage) shared across multiple beam directing modes, reducing overall complexity while maintaining versatility.

Inventive Principle:

Principle #6Universality (Multi-functionality)

2Ease of operation

If beam directing systems are switched sequentially, then the ease of operation is improved, but the risk of polarization state changes increases

Engineering Contradiction:

Improveswitching between beam systemsVSAvoidpolarization state consistency

Core Design Contradiction:

Ease of operationVSReliability

Solution Approach 1:

Different beam directing systems are designed with locally optimized optical components tailored to their specific function. The collimated beam system uses optical elements optimized for collimated light, while the focused beam system uses elements optimized for focused light. This local optimization ensures that each system maintains polarization state consistency within its designated operation mode.

Inventive Principle:

Principle #3Local quality

3Device complexity

If a single beam directing system is used, then the device complexity is reduced, but the adaptability to different measurement requirements is limited

Engineering Contradiction:

Improvenumber of beam systemsVSAvoidbeam configuration options

Core Design Contradiction:

Device complexityVSAdaptability or versatility

Solution Approach 1:

The ellipsometer system incorporates dynamic switching capability between different beam directing configurations. The system can adaptively select between collimated and focused beam modes based on measurement requirements, providing versatility without requiring permanent integration of all possible beam directing options simultaneously.

Inventive Principle:

Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables easy switching between different beam directing systems in ellipsometers without altering polarization, allowing for accurate calibration and identification of system drift, thereby improving the reliability and versatility of ellipsometer systems.

Implementation Method 1

two total internal refection beam directing prisms, one before and one after a sample placed on said stage for supporting a sample

Methodology Applied

Scientific EffectTotal internal reflection: Total Internal Reflection

Implementation Method 2

two beam folding optics systems, each comprising four flat mirrors, one before and one after a sample placed on said stage for supporting a sample

Methodology Applied

Scientific EffectReflection: Reflection

Implementation Method 3

two beam focusing optics systems, each comprising two flat and mirrors, a convex mirror and a concave mirror, one before and one after a sample placed on said stage for supporting a sample

Methodology Applied

Scientific EffectReflection: Reflection

Data Source

PatentUS12405210B1System for, and calibration and testing of directed beam ellipsometer systems

Publication Date: 2025.09.02 J A WOOLLAM CO

AI summary

Systems for and methodology of calibration, as well as testing of beam directing Ellipsometer systems which utilize polarized electromagnetic radiation to investigate samples.