Modular Coater Gas Separation Using Injection Barriers
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Solution Overview
Problem
Existing vacuum coater apparatuses for depositing multi-layer coatings on large glass substrates face challenges with inefficient gas separation between depositing zones, leading to suboptimal performance and increased complexity, especially when producing coatings with multiple infrared reflective layers, requiring longer separation zones and more pumping capacity.
Innovation Solution
A dynamic gas injection system is introduced in the separation zone between depositing zones, allowing adjustable gas flow to enhance separation efficiency, combined with optimized pumping, reducing the length of the separation zone and number of pumps.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the length of the separation zone is increased to improve gas separation between depositing zones, then the gas separation factor is improved, but the apparatus size and complexity increase
Solution Approach 1:
A jet of gas is introduced as an intermediary substance in the separation zone to enhance the separation between adjacent depositing zones. The injected gas creates a barrier that prevents gas from one depositing zone from contaminating the neighboring zone, achieving superior separation without requiring an excessively long separation zone. The gas jet acts as a dynamic mediator that actively pushes back against gas diffusion between zones.
Solution Approach 2:
The invention uses pneumatic principles by injecting a controlled jet of gas into the separation zone to create pressure gradients and flow patterns that enhance gas separation. The injected gas creates a high-velocity flow that physically separates the atmospheres of adjacent depositing zones, utilizing fluid dynamics to achieve better isolation than passive geometric separation alone could provide.
2Reliability
If the number of pumps in the separation zone is increased to improve gas separation, then the gas separation factor is improved, but the device complexity and cost increase
Solution Approach 1:
The injected gas jet serves as an active intermediary that enhances separation effectiveness without requiring proportional increases in pumping capacity. By introducing this intermediate gas flow, the system achieves better separation with the existing pump configuration, as the jet actively prevents gas back-diffusion rather than relying solely on pumping speed to maintain pressure gradients.
Solution Approach 2:
The invention changes the operational parameters of the separation zone by introducing a controlled gas flow rate as a new variable. This parameter change allows the system to achieve higher separation factors without increasing pump capacity, as the gas flow rate can be adjusted to optimize separation effectiveness independently of the pumping system's capabilities.
3Productivity
If multiple depositing zones are placed adjacent to each other to increase production capacity, then the productivity is improved, but the gas separation between zones becomes insufficient leading to poor coating quality
Solution Approach 1:
The injected gas jet acts as a mediator between adjacent depositing zones, allowing them to be placed closer together while maintaining atmospheric isolation. This enables the system to increase production capacity by processing multiple substrates simultaneously in adjacent zones without compromising coating quality, as the gas jet prevents cross-contamination between zones.
Solution Approach 2:
The gas injection can be operated in a periodic or pulsed manner, activating the separation mechanism only when needed during the deposition process. This periodic action maintains coating quality by providing separation when gas contamination risks are highest, while allowing adjacent zones to operate at higher densities for improved productivity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly improves gas separation factors by 2 to 20 times, enabling flexible and efficient operation with reduced space and cost, allowing for higher production flexibility and compatibility with various coating processes.
Implementation Method 1
a gas is injected into the separation zone in the vicinity of the conveying path in order to increase the separation factor between the two atmosphere types
Implementation Method 2
depositing under vacuum a multi-layers coating stack
Implementation Method 3
The apparatus is a cathodic sputtering apparatus and may be a magnetically enhanced sputtering apparatus, also called a magnetron
Implementation Method 4
a process for depositing under vacuum a multi-layers coating stack on a flat glass substrate
Data Source
Figure 1~2
AI summary
The invention relates to a process for depositing under vacuum a multilayers coating stack on a flat glass substrate and to a modular coater for the deposit of thin layers on a flat glass substrate. A gas separation zone disposed between two depositing zones of the modular coater comprises at least one gas injector in the vicinity of the convoying path for the glass substrate which passes through apertures from a depositing zone towards the other depositing zone via the separation zone. The invention allows improvement of the separation factor between the two depositing zones.