Modular Collector Assembly for Semiconductor Wafer Processing
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Solution Overview
Problem
Conventional collector designs for semiconductor wafers are inflexible, as they require all three processing levels to be used simultaneously, and maintenance of any part renders the entire collector out of service, limiting adaptability and efficiency.
Innovation Solution
A modular collector assembly with interconnectable base, top, and intermediate components, featuring radially inner troughs for liquid collection and outer annular ducts for gas collection, with deflectors directing fluids to drainage channels and separate exhaust systems for each level, allowing for easy reconfiguration and independent maintenance of levels.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a conventional collector design with three fixed process levels is used, then the collector can accommodate multiple processing levels, but the entire collector must be used for all three levels and cannot be reconfigured to use only one or two levels
Solution Approach 1:
The collector is divided into separate modular components including a base component, top component, and one or more intermediate components that can be independently assembled and disassembled. Each component can be configured to create different numbers of process levels (one, two, or three), allowing the system to adapt to varying processing requirements without being locked into a fixed three-level structure.
2Ease of repair
If a conventional integrated collector design is used, then the collector provides complete coverage for all processing levels, but cleaning and repair of any part places the entire collector out of service
Solution Approach 1:
The collector is segmented into independently serviceable components (base component, top component, intermediate components). This segmentation enables maintenance personnel to access, clean, and repair specific components without disassembling or taking out of service the entire collector assembly, thereby maintaining productivity while facilitating ease of repair.
Solution Approach 2:
Individual collector components can be extracted or removed from the assembly for cleaning and maintenance purposes. The modular design allows specific components to be taken out, serviced, and reinstalled without affecting the operation of the remaining collector components, thus preventing complete system downtime.
3Ease of repair
If a modular collector assembly with separable components is used, then independent maintenance of each level is enabled, but the device complexity increases due to multiple components
Solution Approach 1:
The collector is divided into a base component, top component, and intermediate components that can be independently maintained. While this segmentation increases the number of parts, it provides significant operational advantages by enabling independent maintenance of each component, reducing overall system downtime, and improving repair efficiency.
Solution Approach 2:
The modular components are designed with standardized interfaces and configurations that allow them to serve multiple functions. The same base component can support different numbers of process levels depending on which intermediate and top components are attached, reducing the need for entirely different collector designs for different configurations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables flexible reconfiguration of processing levels, independent maintenance of each level, and prevents cross-contamination of gases, enhancing operational efficiency and adaptability in surface treatment processes.
Implementation Method 1
a lower portion of the top component is formed as a deflector having a downwardly facing annular surface that directs process fluids radially outwardly and downwardly toward a drainage channel
Data Source
AI summary
A collector assembly for use with a spin chuck includes a base component, a top component and a first intermediate component configured to be fitted between the base component and the top component. The base, top and first intermediate components are configured so as to be interconnectable to form a process enclosure and so as to be separable from one another. The base component and the intermediate component each comprise collector wall segments such that when the base, top and first intermediate components are interfitted, the wall segments together define an outer side wall of the collector assembly.