Modular Combustion Chamber Layout for Scalable Effluent Abatement
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Solution Overview
Problem
Existing abatement apparatus are not easily scalable to deal with different types and quantities of effluent streams, requiring unique designs and larger installations, and lack flexibility in handling intermittent flows.
Innovation Solution
A modular abatement apparatus with a common housing chamber and multiple combustion chamber modules, each containing a foraminous sleeve, allowing for customizable configurations and easy scalability by selecting the number and size of modules to match effluent stream types and flow rates.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a single custom-designed abatement apparatus is used for each effluent stream type and flow rate, then the treatment is optimized for that specific application, but the device complexity and scalability are limited
Solution Approach 1:
The abatement apparatus is divided into multiple interchangeable combustion chamber modules, each capable of treating a specific effluent stream type or flow rate. These modular units can be independently designed, tested, and validated, then combined in different configurations to match various application requirements, eliminating the need for complete custom design for each application.
Solution Approach 2:
The standardized combustion chamber modules are designed to be universally applicable across multiple effluent stream types and flow rates. Each module can be independently configured and positioned within a common housing to create a customized treatment system, allowing the same modular components to serve multiple functions and applications.
2Reliability
If multiple separate abatement apparatus are provided for intermittent effluent streams, then each stream type is treated appropriately, but the installation size and cost increase
Solution Approach 1:
Multiple combustion chamber modules designed for different effluent stream types are merged into a single common housing structure. The modules can be positioned adjacent to each other or stacked vertically, sharing common support structures, access pathways, and control systems, thereby reducing the overall installation footprint compared to providing separate standalone apparatus for each stream type.
Solution Approach 2:
The modular combustion chambers can be arranged in three-dimensional configurations within the common housing, such as stacking modules vertically or arranging them in layered patterns. This spatial optimization allows multiple treatment units to occupy less horizontal space while maintaining independent operation for different effluent streams.
3Productivity
If a new design is created for each effluent stream flow rate, then the treatment is optimized for that flow rate, but the time and resources required for design and validation increase
Solution Approach 1:
The combustion chamber modules are pre-designed and pre-validated for specific effluent stream types and flow rates before deployment. Each module undergoes complete design validation in advance, and the standardized designs are documented and stored for rapid selection and deployment. When a new application arises, the appropriate pre-validated module is selected and configured, eliminating the need for time-consuming new design and validation cycles.
Solution Approach 2:
The modular system allows for parameter optimization by selecting modules with different internal configurations (such as varying catalyst bed sizes, combustion chamber volumes, or flow distribution patterns) that are pre-engineered for specific flow rate ranges. This enables treatment optimization for different flow rates through module selection rather than custom design, maintaining productivity while reducing development time.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient and flexible treatment of various effluent streams using a standardized set of components, reducing installation size and cost by allowing modules to be easily added, removed, or replaced, and operated independently.
Implementation Method 1
Fuel gas and air are simultaneously supplied to the foraminous burner to affect combustion at the exit surface. The products of combustion from the foraminous burner react with the effluent stream mixture to combust compounds in the effluent stream.
Data Source
Figure 1(A)~1(C)
Figure 1D~2(B)
Figure 3(A)~3(B)
AI summary
A modular abatement apparatus and a method are disclosed. The modular abatement apparatus is for abatement of an effluent stream from a semiconductor processing tool and comprises: a housing defining a common housing chamber; a plurality of combustion chamber modules positionable within the common housing chamber for treating the effluent stream, each combustion chamber module containing a foram incus sleeve defining a combustion chamber therewithin. In this way, multiple combustion chambers may be provided within a single, common housing, each of which may be configured to treat a particular effluent stream flow. Accordingly, the number of combustion chambers can be selected to match the different types and flowrates of the effluent stream expected from any particular processing tool. This provides an architecture which is readily scalable to suit the needs of different effluent gas stream types and flowrates while retaining a common housing which may interface with upstream and downstream components.