Modular Concentration Control Apparatus for Semiconductor Gas Supply
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Solution Overview
Problem
Conventional concentration control apparatuses in semiconductor manufacturing face issues with increased pressure drop and size due to lengthy pipes, reduced responsiveness, and maintenance challenges, particularly with pipe contamination and the inability to integrate heaters for all pipes.
Innovation Solution
A modular concentration control apparatus with separate blocks for carrier and mixed gas flow paths, incorporating flow rate sensors and control valves, and a concentration detector, allowing for reduced pipe length, improved maintainability, and selective heating of critical paths.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the pipes are arranged freely on the panel to achieve design freedom, then the design flexibility is improved, but the total length of pipes increases causing increased pressure drop and apparatus size
Solution Approach 1:
The apparatus is divided into separate functional blocks: a storage tank block containing the storage tank and integrated heater, and a control device block containing flow rate controllers and concentration detectors. This segmentation allows the pipes connecting these blocks to be minimized in length while maintaining design flexibility, as each block is optimally configured for its specific function.
2Volume of stationary object
If the pipe from storage tank to deposition chamber is elongated to accommodate apparatus layout, then the apparatus size is improved, but the responsiveness deteriorates
Solution Approach 1:
The storage tank and heater are merged into a single integrated unit (storage tank block), and the flow rate controllers and concentration detectors are merged into another integrated unit (control device block). This merging reduces the pipe length between functional elements while maintaining overall apparatus size, thereby improving responsiveness without sacrificing space requirements.
3Ease of operation
If the pipes are separated and spaced apart, then each pipe can be heated individually, but the apparatus size increases and integration is reduced
Solution Approach 1:
The heating function is segmented and integrated specifically into the storage tank block, where the heater is positioned to heat the storage tank and associated piping. This localized heating approach maintains the ability to heat critical sections while reducing overall apparatus size compared to heating all separate pipes individually.
4Productivity
If the pipe connected to the lower stream side than the storage tank is used for material gas flow, then the material gas can be supplied, but the pipe becomes contaminated requiring regular maintenance
Solution Approach 1:
The concentration detector is extracted and placed in a separate control device block that is detachably connected to the storage tank block via a standard connector. This allows the control device block containing the concentration detector to be easily removed and replaced for maintenance or calibration without affecting the storage tank or material gas supply lines, improving maintainability while ensuring continuous material gas supply.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution reduces pressure drop, enhances responsiveness, and facilitates easier maintenance by shortening pipes and allowing for selective heating, while maintaining cost-effectiveness through standardized parts and modular design.
Implementation Method 1
a first flow rate sensor that detects the flow rate of the carrier gas flowing through the carrier gas flow path
Implementation Method 2
a concentration detector that detects the concentration of the material gas flowing through the mixed gas flow path
Implementation Method 3
a first flow rate control valve that on the basis of the detected value of the first flow rate sensor, controls the flow rate of the carrier gas flowing through the carrier gas flow path
Data Source
AI summary
Provided is a concentration control apparatus that, without reducing maintainability, can shorten piping to improve responsiveness. The concentration control apparatus is one adapted to introduce carrier gas into a storage tank storing a material, and control the concentration of material gas that is led out of the storage tank as mixed gas with the carrier gas and results from vaporization of the material. Also, the concentration control apparatus includes: a first unit that controls the flow rate of the carrier gas to be introduced into the storage tank; and a second unit that detects the concentration of the material gas led out of the storage tank.