Modular Cooling Assemblies for Scalable Abatement Equipment
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Solution Overview
Problem
Existing abatement apparatus for semiconductor processing tools face scalability issues with their cooling components, requiring unique designs for varying conditions and leading to high inventory costs and maintenance complexity.
Innovation Solution
A modular cooling assembly system with identical components that can be scaled to meet different cooling requirements, incorporating pumps, separators, and heat exchangers to provide flexible and efficient cooling.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If cooling components are designed uniquely for each abatement apparatus configuration, then cooling performance is optimized for specific conditions, but device complexity and inventory costs increase
Solution Approach 1:
The patent applies universality by designing a single standardized cooling assembly that can serve multiple abatement apparatus configurations. The cooling assembly includes a heat exchanger, pump, and coolant reservoir that are designed to be universally applicable across different apparatus types and cooling requirements, eliminating the need for custom cooling components for each configuration.
Solution Approach 2:
The patent segments the cooling system into a modular cooling assembly that can be independently installed and removed from the abatement apparatus. This segmentation allows the cooling system to be standardized while maintaining flexibility in deployment, as multiple cooling assemblies can be added or removed based on specific cooling requirements without affecting the core abatement function.
2Productivity
If custom cooling designs are created for varying abatement apparatus conditions, then cooling efficiency is maximized, but manufacturing costs and part inventory increase
Solution Approach 1:
The cooling assembly is designed as a universal component that can be manufactured once and deployed across multiple abatement apparatus configurations. The heat exchanger, pump, and reservoir are designed with standardized interfaces and dimensions that allow them to be used interchangeably in different apparatus types, significantly reducing manufacturing costs while maintaining cooling efficiency through proper sizing and configuration.
3Adaptability or versatility
If multiple unique cooling designs are maintained, then specific cooling needs are met, but maintenance complexity and time increase
Solution Approach 1:
The standardized cooling assembly design allows maintenance personnel to use the same repair procedures, replacement parts, and diagnostic tools across all abatement apparatus configurations. Any failure in the cooling system can be addressed using identical replacement components and procedures, significantly reducing maintenance complexity and downtime compared to maintaining multiple unique cooling designs.
4Reliability
If cooling systems are designed for specific apparatus configurations, then cooling performance is optimized, but scalability to varying needs is limited
Solution Approach 1:
The cooling system is segmented into modular cooling assemblies that can be independently added, removed, or configured based on the specific cooling requirements of different abatement apparatus. This segmentation enables easy scalability - if higher cooling capacity is needed, additional cooling assemblies can be added to the system without redesigning the entire cooling infrastructure.
Solution Approach 2:
The universal cooling assembly design provides scalability by allowing the same standardized component to serve multiple apparatus configurations and cooling capacity requirements. The modular nature of the assembly enables flexible configuration to match varying cooling needs while maintaining consistent performance characteristics across all deployments.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables scalable and cost-effective cooling solutions by reducing the need for bespoke parts, simplifying maintenance, and ensuring efficient coolant recirculation for various abatement apparatus configurations.
Implementation Method 1
a heat exchanger to cool the coolant
Implementation Method 2
a pump to recirculate the coolant from the drain tank through the heat exchanger and back
Data Source
AI summary
A method of cooling an abatement apparatus for abatement of an effluent stream from a semiconductor processing tool includes: providing at least one modular cooling assembly having a cooling capacity; determining a cooling requirement of an abatement apparatus; and incorporating into the abatement apparatus a number of the modular cooling assemblies whose cumulative cooling capacity at least matches the cooling requirement of the abatement apparatus. In this way, multiple modular cooling assemblies may be incorporated into the abatement apparatus, each of which provides cooling capacity. The number of modular cooling assemblies can be selected to suit the cooling requirement of the abatement apparatus.