Modular Cryopump Electrical Connections for Faster Repair
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Solution Overview
Problem
Existing cryopumps are difficult to repair, leading to prolonged downtime and increased costs in semiconductor manufacturing due to the complexity of replacing faulty electrical components without specialized knowledge or tools.
Innovation Solution
The cryopump is designed with modularized electrical components, including connectors that allow for easy attachment and detachment, facilitating the replacement of components like valves and pressure gauges, enabling users to diagnose and repair faults without disassembling the electrical control unit.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If electrical components are integrated into the electrical control unit, then the control unit functions properly, but the components become difficult to repair and replacement requires specialized knowledge and tools
Solution Approach 1:
The electrical control unit is segmented into a main body and detachable component units (purge valve unit, rough valve unit, vent valve unit, pressure gauge unit). Each component is separated into an independent unit that can be detached via connectors, allowing repair without specialized knowledge while maintaining proper control unit function through the connector interface
2Ease of repair
If components are made modular with detachable connectors, then repair becomes easier and faster, but the device structure becomes more complex
Solution Approach 1:
The connector design serves multiple functions: it provides detachable connection for ease of repair, maintains electrical connectivity for control unit function, and enables modular assembly. This universal connector design achieves ease of repair without proportionally increasing device complexity
3Device complexity
If components are integrated permanently, then the device structure is simpler, but downtime during repair is prolonged and costs increase
Solution Approach 1:
Components are pre-configured as detachable units with connectors already attached, allowing users to quickly replace faulty components without disassembly work. This preliminary modular configuration reduces repair downtime and costs while maintaining relatively simple device structure
Data Source
AI summary
A cryopump includes a housing, an electrical control unit which controls the cryopump, a purge valve provided on a passage between an external purge gas source and the inside of the housing, a rough valve provided on a passage between an external pump and the inside of the housing, a vent valve provided on a passage between the inside and the outside of the housing, and a Pirani gauge which measures a pressure inside the housing. The electrical control unit is connected to each of the purge valve, rough valve, vent valve, and Pirani gauge via a wire. Each of the wires is provided with a connector on the component side and a connector on the electrical control unit side. The connector on the component side is configured to be attachable to and detachable from the connector on the electrical control unit side.