Modular Desiccant Equipment for EFEM Humidity Control
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Solution Overview
Problem
Existing humidity control systems for EFEMs in semiconductor manufacturing lack effective control over humidity levels in transfer chambers, leading to particle formation and defects on wafers due to uncontrolled moisture reactions with residual gases.
Innovation Solution
A humidity control system using desiccant equipment that can be installed and separated from the EFEM, comprising a plurality of block bodies that accommodate humidity control equipment, including a desiccant rotor and a regenerative heater, allowing for adjustable configuration and individual management.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If desiccant equipment is installed integrally with the EFEM, then humidity control function is provided, but individual management and maintenance becomes difficult
Solution Approach 1:
The desiccant equipment is divided into multiple independent block bodies that can be individually managed, installed, and maintained. Each block body contains complete functional components including desiccant rotors and regenerative heaters, enabling independent operation and maintenance without affecting the entire system.
2Object-affected harmful factors
If nitrogen is supplied into the interior to minimize humidity, then humidity is reduced, but high costs are necessary due to large amount of nitrogen required
Solution Approach 1:
The system replaces the chemical method of using nitrogen gas with a mechanical/physical desiccant-based humidity control system. The desiccant rotors physically adsorb moisture from the air through rotation and regeneration cycles, eliminating the need for continuous nitrogen supply and associated costs.
Solution Approach 2:
The system changes the approach from adding inert gas (nitrogen) to actively removing moisture through desiccant adsorption. The regenerative heater modifies the temperature parameter of the desiccant material to enable repeated adsorption-regeneration cycles, providing sustained humidity control without substance consumption.
3Reliability
If desiccant equipment is installed integrally with the EFEM, then humidity control is provided, but device complexity increases making separation and individual management difficult
Solution Approach 1:
The integrated desiccant system is segmented into separate block bodies that can be independently installed on or removed from the EFEM. This modular architecture maintains the humidity control function while reducing overall system complexity and enabling flexible configuration.
Solution Approach 2:
The system transitions from a fixed integrated structure to a dynamic configurable arrangement where block bodies can be installed, removed, and repositioned as needed. This flexibility allows the system to adapt to different operational requirements without increasing structural complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively controls humidity levels in transfer chambers without using nitrogen, reducing particle generation and defects on wafers, while allowing for efficient management and maintenance of desiccant equipment.
Implementation Method 1
a desiccant rotor including an adsorbent that adsorbs moisture of air that is to be supplied to the transfer chamber
Implementation Method 2
a regenerative heater that heats the air and causes the heated air to remove the moisture adsorbed to the adsorbent
Data Source
AI summary
Disclosed is a humidity control system for an EFEM using desiccant includes the equipment front end module (EFEM) including a transfer chamber being a space, in which a processing target object is transferred into a processing module, and a desiccant equipment installed in the EFEM to be separable, and that controls a humidity of the transfer chamber, the desiccant equipment includes a plurality of block bodies coupled to or separated from each other, and being transportable individually, each of the plurality of block bodies accommodates a humidity control equipment, and the humidity control equipment includes: a desiccant rotor including an adsorbent that adsorbs moisture of air that is to be supplied to the transfer chamber, and being rotated by a driving motor, and a regenerative heater that heats the air and causes the heated air to remove the moisture adsorbed to the adsorbent.