Modular EFEM Layout for Variable Process Chamber Spacing

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Solution Overview

Problem

Existing semiconductor processing systems require customized equipment front-end modules (EFEMs) to accommodate different process modules, leading to increased costs and complexity due to varying spacing needs for service access and floor space optimization.

Innovation Solution

The design of an EFEM with a modular architecture that includes a load port seat, transfer robot seat, fan filter unit, and controls box, featuring adjustable components such as plate bodies and tunnel bodies with passthroughs, allows for standardized spacing of process modules with single, dual, or quad chamber arrangements using a singular EFEM arrangement, eliminating the need for customization.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If customized EFEMs are used for different process modules, then service access and floor space optimization are improved, but manufacturing cost and device complexity increase

Engineering Contradiction:

Improveservice accessVSAvoidEFEM customization

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The EFEM is divided into modular components including a base structure, adjustable positioning mechanisms, and interchangeable interface modules. This segmentation allows different process modules to be accommodated by reconfiguring modular elements rather than customizing the entire EFEM, reducing manufacturing complexity while maintaining adaptability for service access

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The EFEM incorporates adjustable positioning mechanisms that allow dynamic reconfiguration of component positions and spacing. This enables a single EFEM design to adapt to different process module requirements through mechanical adjustment rather than customization, resolving the contradiction between versatility and complexity

Inventive Principle:

Principle #15Dynamics

2Adaptability or versatility

If customized EFEMs are used for different process modules, then service access is improved, but manufacturing cost increases

Engineering Contradiction:

Improveservice accessVSAvoidEFEM manufacturing cost

Core Design Contradiction:

Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

The EFEM employs universal interface standards and standardized mounting configurations that enable a single EFEM design to serve multiple process module types. This universality eliminates the need for costly customizations while maintaining the ability to provide appropriate service access for different module configurations

Inventive Principle:

Principle #6Universality (Multi-functionality)

Solution Approach 2:

By segmenting the EFEM into standardized modular components, the design allows different process modules to be accommodated through reconfiguration of existing modules rather than custom manufacturing, significantly reducing production costs while maintaining adaptability

Inventive Principle:

Principle #1Segmentation

3Area of stationary object

If EFEM spacing is optimized for specific process modules, then floor space usage is improved, but adaptability to different module configurations decreases

Engineering Contradiction:

Improvefloor spaceVSAvoidmodule configuration flexibility

Core Design Contradiction:

Area of stationary objectVSAdaptability or versatility

Solution Approach 1:

Inventive Principle:

Principle #15Dynamics

Data Source

PatentUS20240178019A1Equipment front-end modules for semiconductor processing systems and methods of making semiconductor processing systems

Publication Date: 2024.05.30 ASM IP HLDG BV

AI summary

An equipment front-end module (EFEM) includes a with a load port seat and a transfer robot seat. A fan filter unit is supported by the frame assembly and a controls box encloses the fan filter unit and is supported by the fan filter unit. The rear panel has a tunnel seat, is fixed to the frame assembly, and is separated from the load port seat by the transfer robot seat. One of (a) a plate body with an inboard passthrough and (b) a tunnel body with an outboard passthrough fixed at the tunnel seat and coupled to the frame assembly by the rear panel to space a process chamber with a quad chamber arrangement from the frame assembly differently along a transfer extending through the tunnel seat than a process module having a single or a dual chamber arrangement using a singular EFEM arrangement. Semiconductor processing systems and methods of making semiconductor processing systems are also described.