Modular Electrode Plate With Eutectic Alloy Joining
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Solution Overview
Problem
The upper electrode in dry etching apparatuses experiences thickness reduction over time, leading to frequent replacements and waste, as existing solutions do not effectively address the issue of maintaining electrode thickness for stable etching.
Innovation Solution
A modular electrode plate design featuring plate-like members joined by a heat-resistant eutectic alloy with a melting point below 700°C, allowing for the reuse of one electrode member by reheating and replacing the other, thereby reducing waste.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If the upper electrode is made as a single integrated component, then the structural strength and stability are improved, but the waste of members increases due to complete replacement when thickness decreases
Solution Approach 1:
The upper electrode is divided into multiple plate-like electrode members joined by joining parts. This segmentation allows individual members to be replaced independently when their thickness decreases, rather than replacing the entire electrode, thus reducing waste of members while maintaining structural integrity through the joining parts.
2Ease of repair
If the electrode plate is designed as a single replaceable unit, then the ease of replacement is improved, but the waste of functional members increases
Solution Approach 1:
The electrode plate is segmented into multiple replaceable members connected by joining parts with controlled melting points. This allows selective replacement of only the worn members while retaining intact members, combining ease of replacement with reduced material waste.
Solution Approach 2:
The design enables discarding only the specific electrode members that have undergone thickness reduction while recovering and reusing the joining parts and other intact members through reheating and reassembly, minimizing overall material waste.
3Temperature
If the joining part has high melting point for thermal stability, then the heat resistance is improved, but the ease of member replacement decreases
Solution Approach 1:
The joining part is designed with specific material composition (boron oxide or eutectic alloy with silicon) that provides adequate heat resistance for etching operations while maintaining a melting point below 700°C, enabling easy replacement through reheating. This parameter optimization balances thermal stability with replaceability.
Solution Approach 2:
The joining part utilizes phase transition (melting) at a controlled temperature below 700°C to facilitate easy separation and replacement of electrode members. The melting point is carefully selected to be high enough to withstand etching temperatures but low enough to enable simple reheating for replacement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enables the reuse of electrode members by reheating and melting the joining part, reducing the frequency of replacements and minimizing waste generated from electrode plate replacements.
Implementation Method 1
The joining part has a heat resistance to withstand a temperature of at least 150° C., melts at 700° C. or below
Implementation Method 2
contains any of In, Sn, and Al, and is a eutectic alloy with silicon
Data Source
AI summary
An electrode plate includes: a plurality of plate-like electrode members; and a joining part joining the electrode members to each other in a thickness direction. The joining part has a heat resistance to withstand a temperature of at least 150° C., melts at 700° C. or below.