Modular Facilities Module for Faster Vacuum System Integration

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

The design and installation of bespoke vacuum pumping and abatement systems are time-consuming due to the need for different equipment configurations for various processes, requiring prolonged design, manufacturing, and installation times.

Innovation Solution

A modular vacuum pumping and/or abatement system with a facilities module that includes a frame, input and output facilities, connection lines, and a controller for remote operation, allowing for standardized components and easier integration of multiple modules for different processes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If bespoke vacuum pumping and abatement systems are designed for each process, then the system can be customized to meet specific process requirements, but the design, manufacturing and installation time is prolonged

Engineering Contradiction:
Improvecustomization for specific process requirementsVSAvoiddesign, manufacturing and installation time
Core Design Contradiction:
Adaptability or versatilityVSLoss of time

Solution Approach 1:

The system is divided into separate functional modules (vacuum pumping module, abatement module, facilities module) that can be independently designed, manufactured and tested. Each module has standardized connection interfaces that allow them to be assembled into different configurations for various processes, significantly reducing design and installation time while maintaining process-specific customization.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The modular architecture with standardized interfaces creates universal building blocks that can serve multiple processes. The same basic modules can be configured for different vacuum pumping and abatement requirements by changing the arrangement and connection of modules, eliminating the need to design entirely new systems for each process.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Adaptability or versatility

If different vacuum pumping and abatement equipment are used for different processes, then each process can have optimized equipment, but the complexity of managing multiple different equipment types increases

Engineering Contradiction:
Improveprocess-specific equipment optimizationVSAvoidequipment configuration complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

By segmenting the system into standardized modules with uniform interfaces, the complexity of managing different equipment types is reduced. Each module maintains its process-optimized functionality while the standardized connections simplify integration and management across multiple processes.

Inventive Principle:
Principle #1Segmentation

3Ease of operation

If facilities are distributed throughout the system, then each component can have its own facilities connection, but the installation complexity and space requirements increase

Engineering Contradiction:
Improvefacilities access for each componentVSAvoidinstallation complexity and space
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

Multiple facilities connections (power, coolant, control signals) are merged into a single integrated facilities module. This consolidated module provides all necessary facilities through standardized interfaces, reducing installation complexity and space requirements compared to distributing separate facilities connections throughout the system.

Inventive Principle:
Principle #5Merging (Combining)

Data Source

PatentUS11512688B2Module for a vacuum pumping and/or abatement system
Publication Date: 2022.11.29 EDWARDS LTD
  • US11512688B2 patent drawing
  • US11512688B2 patent drawing
  • US11512688B2 patent drawing

AI summary

A module for a vacuum pumping and/or abatement system. The module comprises a frame defining a space, a plurality of facilities inputs configured to receive facilities from a facilities supply, a plurality of facilities outputs configured to output the received facilities out of the module, and a plurality of facilities connection lines located at least partially within the space defined by the frame. The plurality of facilities connection lines connect the facilities inputs to the facilities outputs. The module further comprises a controller configured to control supply of facilities received at the facilities inputs out of the facilities outputs; and control operation of one or more vacuum pumping and/or abatement apparatuses remote from the module.