Modular Facilities Module for Faster Vacuum System Integration
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Solution Overview
Problem
The design and installation of bespoke vacuum pumping and abatement systems are time-consuming due to the need for different equipment configurations for various processes, requiring prolonged design, manufacturing, and installation times.
Innovation Solution
A modular vacuum pumping and/or abatement system with a facilities module that includes a frame, input and output facilities, connection lines, and a controller for remote operation, allowing for standardized components and easier integration of multiple modules for different processes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If bespoke vacuum pumping and abatement systems are designed for each process, then the system can be customized to meet specific process requirements, but the design, manufacturing and installation time is prolonged
Solution Approach 1:
The system is divided into separate functional modules (vacuum pumping module, abatement module, facilities module) that can be independently designed, manufactured and tested. Each module has standardized connection interfaces that allow them to be assembled into different configurations for various processes, significantly reducing design and installation time while maintaining process-specific customization.
Solution Approach 2:
The modular architecture with standardized interfaces creates universal building blocks that can serve multiple processes. The same basic modules can be configured for different vacuum pumping and abatement requirements by changing the arrangement and connection of modules, eliminating the need to design entirely new systems for each process.
2Adaptability or versatility
If different vacuum pumping and abatement equipment are used for different processes, then each process can have optimized equipment, but the complexity of managing multiple different equipment types increases
Solution Approach 1:
By segmenting the system into standardized modules with uniform interfaces, the complexity of managing different equipment types is reduced. Each module maintains its process-optimized functionality while the standardized connections simplify integration and management across multiple processes.
3Ease of operation
If facilities are distributed throughout the system, then each component can have its own facilities connection, but the installation complexity and space requirements increase
Solution Approach 1:
Multiple facilities connections (power, coolant, control signals) are merged into a single integrated facilities module. This consolidated module provides all necessary facilities through standardized interfaces, reducing installation complexity and space requirements compared to distributing separate facilities connections throughout the system.
Data Source
AI summary
A module for a vacuum pumping and/or abatement system. The module comprises a frame defining a space, a plurality of facilities inputs configured to receive facilities from a facilities supply, a plurality of facilities outputs configured to output the received facilities out of the module, and a plurality of facilities connection lines located at least partially within the space defined by the frame. The plurality of facilities connection lines connect the facilities inputs to the facilities outputs. The module further comprises a controller configured to control supply of facilities received at the facilities inputs out of the facilities outputs; and control operation of one or more vacuum pumping and/or abatement apparatuses remote from the module.


