Modular Filter Cassette Rectangular Pleat Design

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Solution Overview

Problem

Existing cylindrical filtration systems for semiconductor manufacturing fluids face limitations in fluid flow efficiency, configurability, and safety due to their circular pleated membrane design, which restricts fluid flow and makes them difficult to install and replace, especially when dealing with corrosive or toxic liquids.

Innovation Solution

A modular filtration system using a rectangular pleated filter element without a core, where the filter membrane is directly constrained by the main shell, allowing for uniform pleat density and increased filtration area, and a housing design that enables perpendicular geometries and easier installation, with a flow guide to direct fluid flow effectively.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If a circular pleated membrane is used in a cylindrical filter, then the filter can be manufactured with a one-piece housing, but the membrane must be tightly packed towards the center which restricts fluid flow

Engineering Contradiction:
Improveone-piece housing manufacturingVSAvoidfluid flow rate
Core Design Contradiction:
Ease of manufactureVSProductivity

Solution Approach 1:

The patent transitions from a circular/cylindrical filter design to a rectangular filter design. The rectangular configuration allows uniform pleat distribution across the filtration area without the need for tight packing towards a central core, thereby improving fluid flow while maintaining manufacturing efficiency through modular assembly

Inventive Principle:
Principle #4Asymmetry

2Ease of manufacture

If a cylindrical filter design is used, then the housing can be molded as a single piece, but it is difficult to add geometries that run perpendicular to the cylinder's axis

Engineering Contradiction:
Improvesingle-piece housing moldingVSAvoidperpendicular geometry integration
Core Design Contradiction:
Ease of manufactureVSAdaptability or versatility

Solution Approach 1:

The patent divides the filter housing into separate modular components including a main body and end caps that can be assembled together. This segmentation allows perpendicular geometries and additional features to be integrated into the end caps or main body independently, providing design flexibility while maintaining manufacturing efficiency

Inventive Principle:
Principle #1Segmentation

3Stability of the object's composition

If traditional cylindrical filters are used, then they have a established design, but they are difficult to install and replace especially with corrosive or toxic liquids

Engineering Contradiction:
Improvedesign consistencyVSAvoidinstallation and replacement safety
Core Design Contradiction:
Stability of the object's compositionVSEase of operation

Solution Approach 1:

The filter is designed as a modular assembly with separable components including the filtration element, end caps, and housing. This segmentation enables quick installation and replacement by simply assembling or disassembling the modular parts, significantly improving worker safety when handling corrosive or toxic liquids while maintaining design consistency through standardized interfaces

Inventive Principle:
Principle #1Segmentation

4Device complexity

If filters are connected in a fixed configuration, then the system structure is simple, but it is difficult to change the flow from serial to parallel as needed

Engineering Contradiction:
Improvesystem structure simplicityVSAvoidflow configuration flexibility
Core Design Contradiction:
Device complexityVSAdaptability or versatility

Solution Approach 1:

The patent incorporates dynamic flow distribution capabilities through adjustable flow distributors or manifolds that can redirect fluid flow between serial and parallel configurations. This allows the filtration system to adapt its flow pattern based on operational requirements while maintaining a relatively simple overall structure

Inventive Principle:
Principle #15Dynamics

5Device complexity

If a single type of filter is used, then the system is simple, but the ability to apply different filters for different purposes or particle sizes is limited

Engineering Contradiction:
Improvesystem uniformityVSAvoidfilter type diversity
Core Design Contradiction:
Device complexityVSAdaptability or versatility

Solution Approach 1:

The patent designs a universal filter housing and mounting system that can accommodate multiple types of filtration elements with different pore sizes, materials, and configurations. This universal interface allows a single housing to perform multiple filtration functions by simply changing the filter element, thereby achieving filter diversity without increasing overall system complexity

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The rectangular pleat pack design enhances filtration efficiency, reduces the overall dimensions of the filtration system, and allows for more flexible configuration and safer handling by eliminating the need for a separate filter cage and simplifying the installation process, while maintaining effective particle removal capabilities.

Implementation Method 1

employ ultraclean filters having membranes that remove submicron particles

Methodology Applied
Scientific EffectPhysical filtration: Filter (physical)

Implementation Method 2

a flow guide to direct fluid flow effectively

Methodology Applied
Scientific EffectFluid flow direction:

Data Source

PatentEP2747867B1Modular filter cassette
Publication Date: 2019.11.27 ENTEGRIS INC
  • EP2747867B1 patent drawingFigure 1~2A
  • EP2747867B1 patent drawingFigure 2B~2C
  • EP2747867B1 patent drawingFigure 3~4A

AI summary

The present disclosure relates to modular filtration cassettes for filtering liquids including, for example, liquids used in semiconductor manufacturing. A filter housing may define a filter cavity comprising an upstream portion and a downstream portion. The filter may further comprise a filter element disposed in the filter cavity. The filter element may at least partially overlap the filter inlet on a first side of the filter element. The filter element may comprise a rectangular pleated filter with a set of pleats having a first set of pleat tips on an upstream side of the filter element and a second set of pleat tips on a downstream side of the pleated filter.