Modular Flow Dividing System With Block Interfaces
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Solution Overview
Problem
Existing flow dividing systems in semiconductor manufacturing require dedicated setups for each set of specifications, leading to high costs and maintenance challenges due to the need for complete system replacement upon faults, and limit flexibility in arrangement and assembly automation.
Innovation Solution
A modular flow dividing system comprising a master device and slave devices with independent communication units, allowing for flexible arrangement and orientation without additional tubes, and enabling integration of fluid control devices with standardized block-shaped interfaces for reduced costs and improved assembly automation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a dedicated flow dividing system is prepared for each set of specifications, then the flow distribution can be precisely controlled, but the costs increase and maintenance becomes more difficult
Solution Approach 1:
The flow dividing system is divided into independent modular units, each capable of functioning autonomously. This segmentation allows individual modules to be replaced or reconfigured without affecting the entire system, resolving the contradiction between precise control and system reusability.
Solution Approach 2:
The modular design enables each unit to serve multiple functions and be applied in different configurations. The standardized interfaces allow the same module to work in various flow division scenarios, achieving both precise control and versatility.
2Manufacturing precision
If a dedicated flow dividing system is used for each specification set, then the flow control accuracy is maintained, but the entire device must be replaced when a fault occurs, increasing maintenance costs
Solution Approach 1:
By segmenting the system into independent modular units with standardized interfaces, a fault in one module does not compromise the entire system. Only the defective module needs to be replaced, significantly reducing maintenance costs while preserving flow control accuracy in the remaining functional modules.
3Ease of manufacture
If tubes are used to connect the gas box to the flow dividing system, then the connections are established, but assembly man-hours increase and assembly automation becomes difficult
Solution Approach 1:
The patent replaces traditional tube-based mechanical connections with a standardized block-shaped interface system. This substitution eliminates complex tube routing and connection steps, enabling automated assembly while maintaining reliable connections between the gas box and flow dividing system.
4Ease of manufacture
If tubes are required between the flow dividing system and supply positions, then connections are made, but the degree of freedom in arrangement is reduced
Solution Approach 1:
The standardized block-shaped interfaces are designed with universal compatibility, allowing the flow dividing system to be connected to supply positions in various configurations without requiring tubes. This enables flexible arrangement and orientation while maintaining reliable connections.
Data Source
AI summary
To provide a flow dividing system that has an improved degree of freedom in arrangement, is suitable for integration, and achieves reductions in the manufacturing costs and maintenance costs. A flow dividing system for controlling, upon dividing a single flow rate into multiple flow rates, the respective flow rates such that the ratio between the divided flow rates matches a preset flow rate ratio. The flow dividing system has: a manifold 500 for dividing the single flow rate into the multiple flow rates; and multiple fluid control devices 1M, 1S that are formed as separate bodies from the manifold 500, are disposed separately from and independently of each other, and respectively control the multiple flow rates. A master device 1M has communication unit 102M for transmitting a preset flow rate value based on the preset flow rate ratio to a slave device 1S and for receiving a flow rate detection value DQ2 from the slave device 1S, and the slave device 1S has a communication unit 102S for receiving the preset flow rate value from the master device 1M and for transmitting the flow rate detection value DQ2 to the master device 1M.