Modular Fluid Delivery Assembly With Monolithic Flow Paths and Grounding
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Solution Overview
Problem
Existing fluid delivery systems for semiconductor manufacturing are time-consuming to assemble, require multiple seals that can fail, and are prone to electrostatic discharge, which can damage components.
Innovation Solution
A modular fluid delivery system with single-piece, 3D-printed components that integrate fluid handling devices and conduits, eliminating the need for assembly and seals, and incorporating a ground path to mitigate electrostatic discharge.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multi-piece conduits and fluid handling devices are assembled together with seals, then the system can be configured to deliver fluids, but the assembly time increases and the number of sealing interfaces increases which can fail over time
Solution Approach 1:
The patent combines multiple separate components (conduits, fittings, fluid handling devices) into a single integrated monolithic body formed by 3D printing. This merging eliminates the need for assembly between multiple pieces and removes sealing interfaces, directly reducing assembly time while maintaining fluid delivery functionality through internally integrated flow paths.
Solution Approach 2:
The monolithic body is designed to perform multiple functions simultaneously: it serves as a conduit, contains integrated flow paths, provides mounting interfaces for fluid handling devices, and incorporates electrostatic discharge mitigation features. This multi-functionality in a single component achieves system configuration flexibility without requiring multiple separate parts.
2Adaptability or versatility
If multi-piece conduits and fluid handling devices are assembled with seals, then the system can be configured, but the number of sealing interfaces increases which can fail over time
Solution Approach 1:
By merging multiple components into a single monolithic body, the patent eliminates all sealing interfaces that would exist between separate pieces. The integrated flow paths are formed within the solid body material itself, removing the reliability concern of seal failure while maintaining the ability to configure the system for fluid delivery.
Solution Approach 2:
The patent extracts and removes the sealing elements from the system design. Instead of having seals between components, the fluid containment function is achieved through the monolithic structure itself, taking out the problematic sealing interfaces while preserving the essential fluid delivery function.
3Ease of operation
If conventional conduit connectors are used requiring an expander sleeve, then the conduit can be engaged with the connector, but an additional component and assembly step are required
Solution Approach 1:
The patent merges the conduit body and connector into a single integrated monolithic structure. The connector features are formed directly on the 3D printed body, eliminating the need for separate expander sleeves and reducing the total component count while maintaining the conduit connection capability.
Solution Approach 2:
The connector features are pre-formed as integral parts of the monolithic body during the 3D printing process. This preliminary formation of connection features eliminates the need for additional components like expander sleeves and reduces assembly steps, as the connection capability is built-in from manufacturing.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system reduces assembly time and costs, enhances reliability by preventing leaks and damage from electrostatic discharge, and maintains pressure integrity.
Implementation Method 1
some fluids used in integrated circuit manufacturing cause the buildup of electrostatic electricity within the fluid delivery system. The discharge of the electrostatic electricity can damage the fluid delivery system
Implementation Method 2
a ground path disposed within the single-piece body
Data Source
AI summary
A fluid assembly includes a base and at least one first device. The base includes a single-piece body including a base outlet, a base inlet, and a first interface including a first interface inlet and a first interface outlet. The base also includes a first flow path segment formed within the single-piece body that extends from the base inlet to the first interface outlet. The base also includes a second flow path segment formed within the single-piece body that extends from first interface inlet. The base also includes a ground path disposed within the single-piece body. The first device is attachable to the first interface to fluidly connect a first device inlet to the first interface outlet and a second device outlet to the second interface inlet.