Modular Fluid Control Connector Segmentation Design
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Solution Overview
Problem
Conventional fluid control devices in the semiconductor industry face challenges with ease of disassembly and assembly, particle residue in connectors, and frequent leakage issues, particularly with corrosive fluids and hazardous gases.
Innovation Solution
A modular fluid control device design featuring connectors with multiple fluid flowing through holes and channels, allowing for simple stacking and assembly, reduced interface points to minimize leakage, and mirror-surfaced channels to prevent particle residue, using a connector module with connecting blocks and fasteners for secure connections.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If multiple apparatuses are included in a fluid control device to achieve comprehensive fluid control functions, then the functionality and reliability are improved, but the device complexity and difficulty of assembling and disassembling increase
Solution Approach 1:
The fluid control device is divided into multiple independent connecting blocks, each capable of performing specific fluid control functions. These blocks can be assembled in series to form a complete fluid control system, allowing comprehensive functionality while maintaining modularity and ease of assembly/disassembly.
Solution Approach 2:
Each connecting block is designed with universal features including multiple fluid inlet/outlet holes and standardized connection interfaces (depression portions and mounting blocks). This allows a single block design to serve multiple functions when combined with other blocks, reducing the need for specialized components while maintaining system reliability.
2Adaptability or versatility
If multiple connectors and connection interfaces are used to form fluid channels between apparatuses, then the adaptability and flexibility of the fluid control device are improved, but the number of interface points increases leading to higher leakage risks
Solution Approach 1:
Multiple fluid channels are integrated within single connecting blocks rather than using separate connectors for each channel. The blocks combine multiple inlet/outlet holes and internal fluid passages into one unified component, reducing the number of external connection interfaces while maintaining the ability to handle multiple fluid streams simultaneously.
Solution Approach 2:
The standardized depression portion and mounting block interface allows a single connection mechanism to serve multiple fluid channels. This universal interface design enables flexible configuration of fluid paths while minimizing the number of unique connection points that could potentially leak.
3Ease of manufacture
If conventional connectors are used without special surface treatment, then the manufacturing simplicity is maintained, but particle residue accumulates in the gas channels making cleaning difficult
Solution Approach 1:
The internal surfaces of fluid channels within connecting blocks are subjected to mirror finishing treatment, creating a locally enhanced smooth surface quality in critical flow areas. This localized surface treatment prevents particle accumulation in channels while maintaining standard manufacturing processes for the rest of the component.
4Reliability
If the number of connection interfaces is reduced to minimize leakage points, then the sealing performance is improved, but the adaptability and flexibility of combining various fluid control elements is reduced
Solution Approach 1:
Each connecting block incorporates multiple fluid inlet/outlet holes and standardized universal interfaces, allowing a single block to accommodate various fluid control configurations. This multi-functional design reduces the number of blocks needed (and thus connection interfaces) while maintaining high adaptability for different fluid control requirements.
Solution Approach 2:
The system uses modular connecting blocks that can be assembled in different sequences and configurations to create various fluid paths. This segmentation allows flexible adaptation to different applications while using fewer standardized connection interfaces compared to traditional approaches requiring specialized connectors for each configuration.
Data Source
AI summary
The present invention relates to a fluid control device and a connector for the same. The connector includes a first unit and a second unit to form a connector in a particular shape. Thus, the connector and an adjacent connector can be stacked upon each other to allow simple disassembling. The present invention also provides a fluid control device including the connector.