Modular Fluid Fitting Assembly for Precise Semiconductor Flow Control
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Solution Overview
Problem
Existing semiconductor fabrication processes require improved fitting assemblies for fluid flow control that offer increased performance, accuracy, and modularity to meet the demands of advanced chip production while reducing equipment costs.
Innovation Solution
A modular fitting assembly system comprising a fluid delivery module with components such as substrate blocks, seals, and flow paths, allowing for flexible configuration and precise control of fluid flow, suitable for use in semiconductor and solar panel fabrication.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional fitting assemblies are used in fluid delivery systems, then the system structure is simple, but the measurement precision and flow control accuracy are insufficient for advanced semiconductor fabrication
Solution Approach 1:
The fitting assembly is divided into modular components including a body portion with integrated flow control features, seal portions with specific geometries, and interchangeable inserts. This segmentation allows precise control of fluid flow paths while maintaining manufacturing feasibility through standardized modular units.
Solution Approach 2:
The fitting assembly body is designed as a universal component that can accommodate multiple seal types and configurations through standardized interfaces. The integrated flow control features provide multiple functions including flow regulation, sealing, and alignment in a single component, reducing the need for additional specialized parts.
2Adaptability or versatility
If modular fitting assemblies with multiple components are implemented, then the adaptability and flexibility of the system improve, but the device complexity and manufacturing difficulty increase
Solution Approach 1:
The system uses segmented modular components that can be independently manufactured and then assembled. The body portion, seals, and inserts are separate modules that provide adaptability through different combinations while each individual component remains relatively simple to manufacture using standard processes.
Solution Approach 2:
Multiple functions are merged into the fitting assembly body including flow control features, sealing surfaces, and alignment mechanisms. This combining reduces the total number of separate parts needed while maintaining manufacturing simplicity through integrated design rather than multiple discrete components.
3Measurement precision
If precise flow control features are integrated into the fitting assembly, then the measurement precision and flow control accuracy improve, but the manufacturing precision requirements increase
Solution Approach 1:
The flow control functionality is segmented into the body portion with integrated features rather than requiring precise machining of entire assemblies. The modular seals and inserts provide additional precision through standardized geometries that are easier to manufacture with tight tolerances as discrete components.
Solution Approach 2:
High precision manufacturing is applied only to critical local areas such as seal contact surfaces and flow control features within the body portion, while non-critical areas use standard manufacturing tolerances. This localized approach to precision reduces overall manufacturing difficulty while maintaining flow control accuracy.
Data Source
AI summary
Apparatuses for controlling fluid flow are important components for delivering process fluids for semiconductor fabrication. These apparatuses for controlling fluid flow frequently rely on large numbers of fitting assemblies. Fitting assemblies often require tight tolerances, requiring expensive manufacturing processes. Fitting assemblies formed as multiple components can reduce manufacturing costs. Fitting assemblies may be formed of a housing having an insert receiving cavity and an insert having a port, a seal cavity, and a tube stub. A flow path extends from the port to the tube stub to enable flow of fluid therebetween.