Modular Fluidic Device Segmentation for Clogged Passage Replacement
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Solution Overview
Problem
Existing fluidic devices require the entire base member, including link passages and control valves, to be replaced when the chemical solution or ultrapure water passages become clogged, leading to intensive labor and increased costs, even if only one passage needs replacement.
Innovation Solution
A modular design where a first fluid unit with passages for supply sources and a second fluid unit with passages for destinations are removably coupled, allowing each unit to be replaced separately, with on/off valves at intersecting points controlling fluid flow and pressure sensors for monitoring.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the entire base member is replaced when chemical solution or ultrapure water passages become clogged, then the fluidic device can be restored to proper function, but the labor and costs for replacement increase significantly
Solution Approach 1:
The base member is divided into multiple independent units: a first unit containing the chemical solution passage, a second unit containing the ultrapure water passage, and a third unit containing the link passages. This segmentation allows only the specific unit with the clogged passage to be replaced, rather than replacing the entire base member, thereby reducing replacement labor and costs while restoring functionality.
2Reliability
If the entire base member is replaced when a passage becomes clogged, then the clogged passage problem is solved, but all control valves and pipes must be removed requiring intensive labor
Solution Approach 1:
By segmenting the base member into separate units for chemical solution, ultrapure water, and link passages, the system enables targeted replacement of only the affected unit. This eliminates the need to remove and reinstall all control valves and pipes associated with other functional units, significantly reducing replacement time and operational disruption.
3Ease of manufacture
If the single base member is replaced in its entirety even when link passages do not need replacement, then the chemical solution and ultrapure water passages can be replaced, but costs increase unnecessarily
Solution Approach 1:
The base member is segmented into independently replaceable units, where the first unit contains the chemical solution passage, the second unit contains the ultrapure water passage, and the third unit contains the link passages. This allows replacement of only the specific unit containing the defective passage, preventing unnecessary replacement of functional units and their associated components, thereby reducing material costs and waste.
4Ease of operation
If control valves are placed at each inlet opening from chemical solution and ultrapure water passages to link passages, then fluid flow can be controlled, but the complexity of the base member increases
Solution Approach 1:
Control valves are integrated within specific units (first unit for chemical solution, second unit for ultrapure water) rather than being distributed throughout the entire base member. This modular integration maintains fluid flow control functionality while reducing overall structural complexity, as each unit can be designed and assembled independently with its associated control valves.
Data Source
AI summary
Provided is a fluidic device including a first fluid unit having a plurality of first passages for passing fluids along a first direction, a second fluid unit having a plurality of second passages for passing the fluids along a second direction intersecting the first direction, and a plurality of on/off valves placed at a plurality of points, one at each point, where the first passages and the second passages intersect with each other. The first fluid unit and the second fluid unit are arranged such that outlets formed at a plurality of locations of the first passages are coupled to inlets formed at a plurality of locations of the second passages at each of the points.