Modular Gas Box Substrates for Faster Custom Gas Delivery Assembly
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Solution Overview
Problem
Current gas delivery systems for semiconductor manufacturing are overly modular, leading to excessive assembly time, integration errors, and high costs due to the need for numerous configurations and extensive documentation, making fast configuration of custom gas boxes impractical.
Innovation Solution
A limited set of primitive substrates with standardized dimensions and features that can be quickly assembled to form any gas box, using a universal back-plane and standardized components, allowing for rapid configuration and reduced inventory needs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If highly modular gas flow components are used to create customized gas boxes for each end user and process application, then adaptability and versatility are improved, but device complexity and assembly time increase excessively
Solution Approach 1:
The patent implements a universal gas stick design with standardized component locations and configurations that can serve multiple process applications. Instead of creating highly customized gas boxes for each end user, the system uses a single modular platform that can be adapted to different needs through selective activation of pre-configured connections, reducing the number of unique component configurations while maintaining versatility
Solution Approach 2:
The gas delivery system is divided into discrete modular segments (gas sticks) that can be independently configured and assembled. Each gas stick contains standardized sections for different gas types and flow rates, allowing flexible combination to meet various process requirements without requiring complete customization of each system
2Adaptability or versatility
If many small highly modular pieces are repeated over and over again in gas sticks, then adaptability is improved, but assembly time and integration testing time increase excessively
Solution Approach 1:
The gas sticks are pre-assembled with standardized components in predetermined configurations during manufacturing. Connection points, tubing routes, and component placements are established in advance according to standard process requirements, eliminating the need for time-consuming on-site assembly and integration testing of individual modular pieces
Solution Approach 2:
Multiple small modular components are pre-integrated into unified gas stick assemblies during manufacturing. Rather than assembling numerous separate pieces during installation, the system combines tubing, flow controllers, valves, and connections into pre-configured modular units that can be installed as complete functional segments
3Manufacturing precision
If extensive documentation and CAD modeling of each part is performed, then design precision is improved, but design time and cost increase excessively
Solution Approach 1:
The patent uses standardized blueprints and repeatable design templates for gas stick configurations. Instead of creating unique CAD models and documentation for each custom gas box, the system relies on proven standard designs that can be replicated across multiple applications, maintaining design accuracy while dramatically reducing documentation time and cost
Data Source
AI summary
In one embodiment, the disclosed apparatus is at least one gas-primitive substrate for use in a gas-delivery box. Each of the at least one gas-primitive substrates has at least one location on which a gas-delivery component is to be mounted. The at least one location has at least a gas-delivery component inlet port and a gas-delivery component outlet port formed within a body of the gas-primitive substrate. At least one first pair of bore holes comprising a gas-flow path is formed on an upstream side and a downstream side, respectively, of the location of the gas-delivery component. Other apparatuses and systems are disclosed.