Modular Gas Distribution Plumbing for Thermal Uniformity

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Solution Overview

Problem

Substrate processing systems face challenges with complex geometry in gas delivery systems leading to thermal load mismatch, hot and cold spots, flow mismatches, and decomposition or condensation of sensitive precursors, along with difficult access for installation and service due to self-supporting components prone to misalignment.

Innovation Solution

A layered gas distribution arrangement with multiple valve inlet blocks and modular design improves thermal uniformity, modularity, cost, serviceability, and durability, allowing for greater chemistry combinations by simplifying plumbing geometry and heating each valve inlet block with a single hybrid clamshell/oven heater.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If a complex geometry gas delivery system is used to deliver process gases to processing chambers, then gas distribution capability is improved, but thermal uniformity deteriorates leading to hot and cold spots

Engineering Contradiction:

Improvegas distribution capabilityVSAvoidthermal uniformity

Core Design Contradiction:

Adaptability or versatilityVSTemperature

Solution Approach 1:

The gas delivery system is divided into multiple modular valve inlet blocks, each handling specific gas distribution functions. This segmentation allows independent optimization of thermal management for each module while maintaining overall system complexity for diverse gas distribution needs.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Heating elements are introduced as intermediary components between the gas sources and processing chambers to actively compensate for thermal non-uniformities. These heating elements serve as mediators that add thermal energy to cold spots without requiring redesign of the entire gas delivery geometry.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Stability of the object's composition

If self-supporting components are used in the gas delivery system, then structural stability is improved, but ease of installation and service deteriorates due to misalignment issues

Engineering Contradiction:

Improvestructural stabilityVSAvoidease of installation

Core Design Contradiction:

Stability of the object's compositionVSEase of manufacture

Solution Approach 1:

The system is divided into discrete, pre-assembled valve inlet block modules that maintain structural stability independently. Each module can be manufactured and tested separately, then installed as a complete unit, reducing on-site alignment complexity while preserving structural integrity.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Each valve inlet block is designed as a self-contained module with integrated support structures and alignment features that enable self-alignment during installation. The modules include built-in mounting provisions and connection interfaces that guide proper positioning without requiring complex external alignment procedures.

Inventive Principle:

Principle #25Self-service

3Temperature

If multiple heating zones are implemented in each valve inlet block, then thermal uniformity is improved, but device complexity increases

Engineering Contradiction:

Improvethermal uniformityVSAvoidheating system complexity

Core Design Contradiction:

TemperatureVSDevice complexity

Solution Approach 1:

Heating elements are strategically positioned at specific locations within each valve inlet block where thermal analysis indicates cold spots occur. This localized heating approach achieves thermal uniformity by addressing only the specific areas that require thermal compensation rather than heating the entire structure uniformly.

Inventive Principle:

Principle #3Local quality

Solution Approach 2:

The heating system uses controllable heating elements with adjustable power levels to dynamically regulate temperature in different zones. By changing the heating parameters (power, timing, zonation) rather than the physical structure, thermal uniformity is achieved without proportionally increasing mechanical complexity.

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution significantly reduces thermal variability from ±10°C to ±2°C, minimizes hot and cold spots, enhances serviceability, and supports a wider range of gas combinations, improving the reliability and efficiency of substrate processing systems.

Implementation Method 1

heating each valve inlet block with a single hybrid clamshell/oven heater

Methodology Applied

Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS20230377908A1Compact modular gas distribution plumbing and heating system for multi-station deposition modules

Publication Date: 2023.11.23 LAM RES CORP

AI summary

A gas distribution arrangement to provide gas mixtures to processing stations in a substrate processing system comprises a first and second valve inlet blocks to supply first and second precursor gas mixtures. The first valve inlet block is arranged above the processing stations and comprises a first housing that encloses a first plurality of valves in fluid communication with the processing stations and a first precursor gas manifold, a first co-flow gas manifold, and a first divert outlet manifold in fluid communication with the first plurality of valves. The second valve inlet block is arranged above the first valve inlet block and comprises a second housing that encloses a second plurality of valves in fluid communication with the processing stations and a second precursor gas manifold, a second co-flow gas manifold, and a second divert outlet manifold in fluid communication with the second plurality of valves.