Modular Gas Mixing Block Layout for Weld-Free Gas Delivery
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing gas delivery assemblies in semiconductor processing systems are complex and time-consuming to design and fabricate, requiring extensive networks of weldments that complicate modifications and servicing, leading to high costs and long fabrication times.
Innovation Solution
The use of modular gas blocks with integrated lumens for gas mixing between adjacent blocks, eliminating the need for complex weldment networks and allowing for easy assembly and customization of gas delivery assemblies.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If traditional gas delivery assemblies are designed using extensive networks of weldments, then gas delivery functionality is achieved, but design and fabrication time increases significantly
Solution Approach 1:
The gas delivery assembly is divided into separate modular components: gas blocks with integrated lumens, valve assemblies, and manifold sections. Each module can be independently designed, fabricated, and tested, then assembled together to form the complete gas delivery system. This segmentation eliminates the need for extensive weldment networks while maintaining gas delivery functionality.
Solution Approach 2:
The patent combines multiple functions into integrated components. Gas blocks contain both the structural body and integrated lumens for gas flow, valve assemblies combine flow control mechanisms with mounting features, and manifold sections integrate multiple gas delivery paths. This merging reduces the number of separate parts and connections required, significantly reducing design and fabrication time.
2Reliability
If complex networks of weldments are used in gas delivery assemblies, then gas distribution is achieved, but modification and servicing becomes difficult
Solution Approach 1:
The modular architecture allows individual gas blocks, valve assemblies, or manifold sections to be removed and replaced without affecting the entire system. If a component needs modification or repair, only that specific module must be accessed, not the entire weldment network. This significantly improves ease of repair and modification.
Solution Approach 2:
The system transitions from a fixed, welded structure to a dynamic, reconfigurable modular system. Modules can be easily added, removed, or repositioned to adapt to changing requirements, making the system highly adaptable for modifications and servicing operations.
3Strength
If traditional gas delivery assemblies are fabricated with extensive weldments, then structural integrity is achieved, but fabrication cost increases
Solution Approach 1:
By segmenting the assembly into modular components that can be manufactured separately using standard machining and assembly processes, the patent eliminates costly and time-consuming weldment fabrication. Each module can be produced using more cost-effective manufacturing methods, then assembled with simple mechanical connections, significantly reducing overall fabrication cost.
Solution Approach 2:
The patent replaces the mechanical welding process with simpler mechanical assembly methods such as threaded connections, bayonet mounts, or clamp fittings. This substitution maintains structural integrity for gas delivery applications while dramatically reducing fabrication complexity and cost.
4Productivity
If modular gas blocks with integrated lumens are used, then assembly time is reduced, but manufacturing complexity of individual blocks increases
Solution Approach 1:
The gas blocks integrate multiple functions within single components: the block body provides structural support, embedded lumens provide gas flow paths, and integrated ports provide connection points. This merging of functions into unified components reduces the total number of parts and assembly operations, significantly reducing assembly time despite the increased complexity of manufacturing each individual block.
Data Source
AI summary
Exemplary modular gas blocks may include a body having inlet and outlet ends. The body may define a portion of a first gas path along a length of the body and may define a second gas path along a width of the body. The first gas path may include channel segments defined within the body. The inlet end may define a gas inlet that is coupled with the first gas path. The body may define first fluid ports that are coupled with the first gas path. A fluid port of the first fluid ports may be coupled with the gas inlet. The first fluid ports may be coupled with one another via a respective channel segment. An upper surface may define a lateral fluid port that is spaced apart from a first fluid port along the width and is coupled with the first fluid port via the second gas path.