Modular Gas Mixing Block With Integrated Lumens for Gas Stick Assembly
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Solution Overview
Problem
Conventional gas delivery assemblies for semiconductor processing systems are complex, time-consuming, and costly to design, fabricate, and modify due to the need for intricate weldments and networks, leading to inefficiencies in gas mixing and delivery.
Innovation Solution
The use of modular gas blocks with integrated lumens that facilitate gas mixing between adjacent gas sticks in the x-direction, eliminating the need for bottom weldments and simplifying the design and assembly process, allowing for easy customization and modification of gas delivery assemblies.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional gas delivery assemblies use intricate weldments and networks to achieve reliable gas mixing and delivery, then gas delivery reliability is improved, but device complexity and manufacturing cost increase
Solution Approach 1:
The gas delivery assembly is divided into modular gas sticks that can be independently assembled and configured. Each gas stick contains integrated lumens for gas flow, eliminating the need for complex weldment networks while maintaining reliable gas delivery through standardized modular components
Solution Approach 2:
Multiple gas flow paths are merged into integrated lumens within each gas stick module. This consolidation reduces the number of separate components and connections required, simplifying the overall assembly while ensuring reliable gas mixing and delivery through the unified lumen structure
2Manufacturing precision
If conventional gas delivery assemblies use intricate weldments and networks to ensure uniform gas flow, then gas flow control precision is improved, but manufacturing time and cost increase
Solution Approach 1:
The gas sticks are pre-fabricated with integrated lumens that have precisely controlled dimensions and configurations. This preliminary manufacturing of standardized modules with built-in flow control features eliminates the need for time-consuming on-site assembly and welding operations while ensuring uniform gas flow characteristics
Solution Approach 2:
The design transitions from complex welded networks to modular assemblies with standardized lumen parameters. By controlling the dimensions, materials, and configurations of the integrated lumens during manufacturing, precise gas flow uniformity is achieved without requiring intricate assembly procedures
3Reliability
If conventional gas delivery assemblies use fixed weldment networks to achieve reliable gas mixing, then gas mixing performance is improved, but adaptability and ease of modification decrease
Solution Approach 1:
The gas delivery system transitions from a fixed welded network to a dynamic modular configuration. Gas sticks can be easily assembled, disassembled, and reconfigured to adapt to different processing requirements while maintaining reliable gas mixing performance through the consistent lumen design and standardized connection interfaces
Data Source
AI summary
Exemplary modular gas blocks may include a body having inlet and outlet ends. The body may define a portion of a first gas path along a length of the body and may define a second gas path along a width of the body. The first gas path may include channel segments defined within the body. The inlet end may define a gas inlet that is coupled with the first gas path. The body may define first fluid ports that are coupled with the first gas path. A fluid port of the first fluid ports may be coupled with the gas inlet. The first fluid ports may be coupled with one another via a respective channel segment. An upper surface may define a lateral fluid port that is spaced apart from a first fluid port along the width and is coupled with the first fluid port via the second gas path.