Modular Gas Mixing Block for Semiconductor Fabrication
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Solution Overview
Problem
Conventional gas delivery assemblies in semiconductor processing systems are complex and inefficient, requiring extensive weldments and time-consuming design and fabrication processes, making it difficult to modify or service existing systems without significant waste and risk of toxic gas exposure.
Innovation Solution
The use of modular gas blocks with identical geometry, allowing for easy assembly and modification by connecting or removing gas sticks, eliminates the need for complex weldments and facilitates gas mixing between adjacent gas sticks, reducing design and fabrication time and cost.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If conventional gas delivery assemblies use extensive weldments to connect gas sticks, then gas delivery functionality is achieved, but device complexity and fabrication time increase significantly
Solution Approach 1:
The gas delivery assembly is divided into separate modular gas blocks that can be independently manufactured and then assembled together using simple coupling mechanisms rather than extensive weldments. Each gas block is a discrete unit with standardized interfaces, allowing for easier manufacturing and reduced fabrication complexity.
Solution Approach 2:
Multiple gas sticks are combined into a single integrated gas delivery assembly by coupling modular gas blocks together. This merging approach maintains gas delivery functionality while reducing the need for complex weldments by using standardized coupling interfaces between modules.
2Adaptability or versatility
If conventional gas delivery assemblies are designed as integrated units, then structural integrity is maintained, but adaptability for modifications is reduced
Solution Approach 1:
The gas delivery assembly is segmented into modular gas blocks that can be independently added, removed, or reconfigured. This segmentation provides adaptability for modifications while maintaining a relatively simple overall assembly structure based on standardized coupling interfaces.
Solution Approach 2:
The modular gas blocks use standardized coupling interfaces that allow the same basic unit to serve multiple positions and functions within the gas delivery assembly. This universality enables flexible modifications and reconfigurations without requiring custom-designed connections for each application.
3Ease of repair
If conventional gas delivery assemblies require complete disassembly for servicing, then structural integrity is preserved, but loss of time and risk of toxic gas exposure increase
Solution Approach 1:
The gas delivery assembly is divided into separable modular gas blocks with standardized coupling interfaces. This segmentation allows individual blocks to be quickly removed and replaced during servicing without requiring complete disassembly, reducing service time and minimizing exposure to toxic gases.
Solution Approach 2:
Individual gas blocks can be extracted from the overall assembly for servicing or replacement. This extraction capability enables targeted maintenance of specific components without disturbing the entire system, reducing the time required for servicing and limiting toxic gas exposure to localized areas.
4Ease of operation
If modular gas blocks with identical geometry are used, then ease of assembly and modification is improved, but gas mixing efficiency may be compromised
Solution Approach 1:
While the overall gas blocks maintain identical geometry for ease of assembly, local variations in channel configuration and positioning are incorporated to optimize gas mixing. Different regions of the modular blocks have specialized flow paths and mixing geometries that enhance gas mixing efficiency while maintaining standardized external interfaces.
Data Source
AI summary
Exemplary modular gas delivery assemblies may include a plurality of modular gas blocks coupled together. Each gas block may include an upper portion and a lower portion. A first end of the upper portion may extend beyond a first end of the lower portion and a second end of the lower portion may extend beyond a second end of the upper portion. A first fluid channel may include a first fluid port, a second fluid port, and a third fluid port. The block body may define a second fluid channel that extends transversely to the first fluid channel. A first modular gas block may be coupled with a second modular gas block and a third modular gas block such that the first fluid channels of each of the first, second, and third modular gas blocks are fluidly coupled with one another.