Modular Gas Supply Assembly for Large Precursor Vessel Swaps
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Solution Overview
Problem
Gas-phase reactor systems face challenges with frequent precursor vessel changes and difficulties in using vessels of varying sizes, affecting throughput and efficiency in processes like semiconductor device manufacturing.
Innovation Solution
A gas supply assembly with a large, easily removable precursor source vessel and adaptable design, including a valve plate, housing, gas feedthrough, and angled removable gas line, allowing for varying vessel sizes and integrated heaters for temperature control, along with leveling devices for precise installation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a small precursor vessel is used, then the vessel can be easily handled and installed, but the precursor capacity is limited requiring frequent changes
Solution Approach 1:
The gas supply assembly is divided into modular components including the vessel, valve plate, housing, and gas distribution system. This segmentation allows the vessel to be independently removed and replaced without affecting other components, enabling easy handling while accommodating larger vessel capacities.
Solution Approach 2:
The system incorporates a removable vessel design with a valve plate that can be detached from the housing. This dynamic configuration allows operators to easily remove and replace precursor vessels of varying sizes, maintaining ease of operation while increasing precursor capacity options.
2Quantity of substance
If a large precursor vessel is used, then the precursor capacity is increased, but the vessel becomes difficult to handle and install
Solution Approach 1:
By segmenting the gas supply assembly into separable components (vessel, valve plate, housing), the system enables easy handling of large vessels through modular replacement rather than manipulating the entire assembly. The vessel can be independently removed from the housing.
Solution Approach 2:
The valve plate serves as an intermediary component that facilitates the connection and disconnection between the vessel and housing. This mediator enables easy installation and removal of large vessels by providing a standardized interface that simplifies the handling process.
3Device complexity
If precursor vessels of fixed size are used, then the system design is simplified, but flexibility to accommodate different applications is reduced
Solution Approach 1:
The gas supply assembly is designed with a universal interface system consisting of a standardized valve plate and housing configuration. This universal design allows vessels of different sizes and shapes to be accommodated within the same system, providing flexibility while maintaining relatively simple system architecture.
Solution Approach 2:
The removable vessel design with detachable valve plate creates a dynamic system that can adapt to different vessel configurations. This flexibility allows the system to accommodate various precursor vessel sizes without requiring complex redesign, balancing adaptability with design simplicity.
4Quantity of substance
If frequent precursor vessel changes are performed, then precursor capacity is effectively managed, but system throughput is reduced
Solution Approach 1:
The system allows for preliminary preparation of multiple precursor vessels that can be pre-filled and staged for quick replacement. The modular design with standardized interfaces enables operators to perform vessel changes more rapidly by having replacement vessels ready, thus maintaining precursor management while minimizing disruption to throughput.
Solution Approach 2:
By segmenting the vessel replacement process into independent, standardized steps (detaching valve plate, removing vessel, installing new vessel), the system enables more efficient and quicker vessel changes. This segmented approach reduces the time required for precursor management activities, thereby preserving system throughput.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances the ease of use and flexibility of gas supply assemblies, enabling efficient processing of substrates by allowing for larger precursor capacities and accommodating different vessel sizes, thereby improving the throughput and efficiency of gas-phase reactor systems.
Implementation Method 1
Exemplary gas supply assemblies can include a heater beneath the vessel and one or more heater leveling devices coupled to (e.g., in contact with) the heater.
Implementation Method 2
a gas feedthrough having a first end interior of the housing and a second end exterior of the housing
Implementation Method 3
one or more valves attached to the valve plate, wherein at least one valve is fluidly coupled to an interior of the vessel
Implementation Method 4
a removable gas line having a first end coupled to the at least one valve and a second end coupled to the gas feedthrough
Data Source
AI summary
Gas supply assemblies and reactors systems including the gas supply assemblies are disclosed. An exemplary gas supply assembly includes a vessel, a valve plate, a housing encasing the vessel and the valve plate, a gas feedthrough having a first end interior of the housing and a second end exterior of the housing, and one or more valves attached to the valve plate, wherein at least one valve is fluidly coupled to an interior of the vessel. The assemblies can further include a removable gas line having a first end coupled to the at least one valve and a second end coupled to the gas feedthrough. Additionally or alternatively, a gas supply assembly can include one or more valve plate leveling devices coupled to the valve plate.