Modular Heating Lamp Assembly for Epitaxial Chambers
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Solution Overview
Problem
Current heating lamp assemblies in epitaxial deposition processing chambers require the entire assembly to be removed for lamp replacement, leading to increased downtime and space constraints, preventing the use of individual lamps due to space limitations and cost considerations.
Innovation Solution
A modular heating lamp assembly design allowing individual lamp replacement without removing the entire assembly, featuring a bulb, reflector, handle, and conductors with unequally spaced pins for secure installation, enabling improved registration and reduced downtime.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of repair
If the entire heating lamp assembly is removed for lamp replacement, then the non-functioning lamp can be replaced, but the downtime increases and process manufacturing times are reduced
Solution Approach 1:
The heating lamp assembly is divided into modular components: individual heating lamps, lamp sockets, and an annular body. This segmentation allows the replacement of only the faulty heating lamp rather than the entire assembly, directly resolving the contradiction by enabling easy repair while minimizing downtime.
Solution Approach 2:
The lamp socket and annular body are designed with movable and interchangeable components that allow quick insertion and removal of individual lamps. The dynamic design enables rapid lamp replacement without requiring removal of the entire assembly, thus reducing downtime while maintaining ease of repair.
2Ease of repair
If current apparatus is used to couple individual heating lamps to the heating lamp assembly, then the lamps can be replaced individually, but space limitations are exceeded and cost increases
Solution Approach 1:
The lamp socket is designed with an annular body that nestedly accommodates multiple lamp sockets around a central axis. Individual heating lamps are inserted into these nested sockets, allowing compact arrangement of multiple replaceable lamps within limited space. This nesting approach enables individual lamp replacement without requiring excessive space.
Solution Approach 2:
The annular body and lamp socket design provides a universal coupling mechanism that can accommodate multiple heating lamps in a compact configuration. This multi-functional design allows the same structural framework to support various lamp arrangements while maintaining space efficiency and enabling individual lamp replacement.
3Ease of repair
If current apparatus is used to couple individual heating lamps to the heating lamp assembly, then the lamps can be replaced individually, but the apparatus is costly
Solution Approach 1:
By segmenting the assembly into standardized, modular lamp sockets and individual lamps, the system enables cost-effective manufacturing through mass production of interchangeable components. The simplified modular design reduces manufacturing complexity and cost compared to custom-coupling apparatus, while maintaining ease of individual lamp replacement.
Data Source
AI summary
Embodiments of heating lamps and heating lamp assemblies are disclosed herein. In some embodiments, a heating lamp may include a bulb; a reflector circumscribing the bulb proximate a first end of the bulb; a base coupled to the reflector on a side opposite the bulb; a handle coupled to the base on a side opposite the reflector, wherein the handle comprises a body having a first end coupled to the base and an opposing second end; a first conductor extending from the bulb and through the base and the handle in a direction opposite the bulb; and a second conductor extending from the bulb and through the base and the handle in a direction opposite the bulb.