Modular ICP Plasma Reactor Assembly for Robust Exhaust Gas Processing
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Solution Overview
Problem
Existing plasma reactors for inductively coupled plasma in semiconductor manufacturing facilities face challenges in structural robustness and ease of assembly, which affect their efficiency and reliability in processing exhaust gases.
Innovation Solution
A plasma reactor design featuring a ferrite core assembly with a stacked ferrite core structure and a method of assembling the reactor by pre-assembling the ferrite core assembly and connecting it with chamber bodies using coupling rods, enhancing structural robustness and assembly workability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a plasma reactor uses a traditional single-piece chamber structure, then structural robustness is maintained, but assembly complexity and manufacturing difficulty increase
Solution Approach 1:
The plasma reactor chamber is divided into multiple separate chamber bodies (first chamber body, second chamber body, etc.) that can be manufactured independently and then assembled together using coupling rods. This segmentation allows each component to be manufactured with standard precision while simplifying the overall assembly process and reducing manufacturing difficulty.
Solution Approach 2:
The chamber bodies are designed to connect through coupling rods that pass through aligned passage portions, creating a nested assembly structure where multiple components fit together in a systematic manner. This nested design facilitates modular assembly while maintaining structural integrity.
2Ease of manufacture
If a plasma reactor uses a modular chamber structure with multiple chamber bodies, then ease of assembly improves, but structural robustness may deteriorate
Solution Approach 1:
Multiple chamber bodies are combined through coupling rods that securely join the separate components together. The coupling mechanism merges the individual chamber bodies into a unified structure that maintains the structural robustness required for plasma processing while preserving the advantages of modular assembly.
Solution Approach 2:
The chamber bodies are designed with pre-formed passage portions and coupling interfaces that align during assembly. This preliminary design of connection features ensures that when the chamber bodies are joined with coupling rods, the resulting structure achieves the required structural robustness without requiring complex post-assembly operations.
3Adaptability or versatility
If a plasma reactor uses a complex multi-component structure, then functionality and adaptability improve, but assembly time and manufacturing cost increase
Solution Approach 1:
The reactor is segmented into standardized chamber body modules that can be assembled in a systematic sequence using coupling rods. This segmentation allows for pre-fabrication of individual modules, enabling parallel manufacturing processes that reduce overall assembly time while maintaining functional adaptability through modular configuration.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The proposed design results in a structurally robust plasma reactor that is easier to assemble and manufacture, improving the efficiency and reliability of exhaust gas processing in semiconductor manufacturing facilities.
Implementation Method 1
when radio frequency power is applied to the antenna coil, a magnetic field is induced by a time-varying current flowing through the antenna coil, thereby generating plasma by an electric field generated inside the chamber
Implementation Method 2
a ferrite core coupled to surround the chamber, an antenna coil wound around the ferrite core
Data Source
AI summary
A plasma reactor for inductively coupled plasma includes: a ferrite core assembly including a ferrite core stacked body including a plurality of ferrite cores stacked and a first passage portion and a second passage portion arranged in parallel, and a ferrite core accommodating structure; a first chamber body including a first base portion configured to provide a first internal space therein, a first A-extension pipe extending from the first base portion, communicating with the first internal space and accommodated in the first passage portion, and a second A-extension pipe extending from the first base portion; and a second chamber body including a second base portion configured to provide a second internal space therein, a first B-extension pipe extending from the second base portion, and a second B-extension pipe extending from the second base portion.