Modular Injection Ramp for Vacuum Evaporation Reconfiguration
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Solution Overview
Problem
Existing vacuum deposition devices require multiple expensive injectors to accommodate substrates of different sizes, leading to increased costs and downtime due to the need for frequent cleaning and reconfiguration.
Innovation Solution
A modular injection system with adjustable cylindrical injection modules and nozzles, allowing for flexible alignment and easy reconfiguration, along with independent heating and sealing mechanisms, to accommodate various substrate sizes without the need for multiple injectors.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple injectors are used to accommodate substrates of different sizes, then the adaptability of the deposition device is improved, but the device complexity and cost increase
Solution Approach 1:
The injection system is divided into multiple modular injection modules that can be independently assembled and configured. Each module contains injection nozzles that can be adjusted to face different directions, allowing the system to adapt to various substrate sizes without requiring completely different injector configurations
Solution Approach 2:
The injection modules are designed with adjustable orientations and positions. The modules can be rotated and repositioned along the injection rail to change the spray pattern and coverage area, enabling dynamic adaptation to different substrate configurations rather than requiring fixed dedicated injectors for each substrate size
2Manufacturing precision
If frequent cleaning of injectors is performed to maintain deposition quality, then the manufacturing precision is improved, but the productivity decreases
Solution Approach 1:
The injection modules are designed to be easily removable from the injection rail. This allows individual modules to be extracted for cleaning or replacement without requiring the entire vacuum deposition chamber to be opened or shut down, thereby maintaining deposition quality while minimizing productivity loss
Solution Approach 2:
The modular design allows for economical replacement of injection modules rather than extensive cleaning and maintenance of expensive fixed injectors. Modules that become heavily contaminated can be replaced with new or refurbished modules, reducing the impact on productivity
3Adaptability or versatility
If the injection system is reconfigured to accommodate different substrate configurations, then the adaptability is improved, but the loss of time increases
Solution Approach 1:
The system uses standardized modular modules that can be quickly assembled and disassembled. Each module is self-contained with standardized connection interfaces, allowing rapid reconfiguration by simply adding or removing modules rather than performing complex adjustments to a monolithic injector system
Solution Approach 2:
The injection modules can be quickly repositioned and reoriented along the injection rail to change the effective injection pattern and coverage area. This allows rapid parameter changes in the injection system without physical reconfiguration, reducing the time needed to adapt to different substrate configurations
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient and cost-effective deposition of thin layers on substrates of varying sizes with reduced downtime, improving the efficiency and adaptability of the vacuum evaporation process.
Implementation Method 1
means for heating the reservoir suitable for evaporating said material
Implementation Method 2
each nozzle comprising at least one communication channel between said internal duct and the external part of the ramp so as to diffuse the evaporated material in said vacuum evaporation chamber
Data Source
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AI summary
The present invention concerns an injection system for an apparatus for depositing thin layers by vacuum evaporation, said injection system comprising a reservoir intended to receive a source of material to be evaporated, means of heating the reservoir capable of evaporating said material, at least one injection ramp comprising an inner conduit connected to the reservoir in such a way as to receive said evaporated material coming from the reservoir and a plurality of nozzles, each nozzle comprising at least a communication channel between said inner conduit and the external portion of the ramp in such a way as to discharge the evaporated material into said vacuum evaporation chamber. According to the invention, the injection ramp comprises a plurality of injection modules mechanically connected to each other in series along a longitudinal direction, each injection module comprising a plurality of injection nozzles, and said injection ramp comprises means of adjusting the orientation of said injection modules about said longitudinal direction in such a way as to align said injection nozzles along a line parallel to the longitudinal direction of the injection ramp.