Modular Inlet Assembly With Common Head for Abatement Flexibility
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Solution Overview
Problem
Existing abatement apparatus require bespoke parts for varying effluent stream flow rates and types, leading to increased inventory and complexity due to differing configuration delivery nozzles and abatement chambers.
Innovation Solution
A common head with interchangeable mounts and feed apertures that accommodate different combustion chamber modules, allowing independent feeding of combustion reagents while avoiding nozzle locations, reducing the need for multiple parts.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If bespoke parts are used for varying effluent stream flow rates and types, then the abatement apparatus can be tailored to specific conditions, but the inventory of parts and device complexity increases
Solution Approach 1:
The abatement apparatus is divided into modular combustion chamber modules that can be independently configured and assembled. Each module contains standardized components (mount, plenum, feed apertures) that can be combined in different arrangements to suit various effluent stream conditions, eliminating the need for completely bespoke parts for each application.
Solution Approach 2:
The common head assembly with its standardized mount and feed aperture configuration serves multiple functions and can accommodate different effluent stream types and flow rates. The universal design allows the same basic components to be used across different applications by simply adjusting the number and arrangement of combustion chamber modules.
2Reliability
If differing configuration delivery nozzles and abatement chambers are used, then adequate abatement can be ensured for specific conditions, but the inventory of parts required for production and maintenance increases
Solution Approach 1:
The delivery nozzle system is segmented into a common head with standardized feed apertures and interchangeable combustion chamber modules. This allows the nozzle configuration to be adapted for different conditions by simply changing which modules are assembled, rather than maintaining inventory of completely different nozzle assemblies.
Solution Approach 2:
While the overall head assembly is standardized, local variations are achieved through the specific configuration of individual combustion chamber modules. Each module can be optimized for local requirements (specific flow rates, compound types) while sharing the common standardized interface and feed system.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Reduces the inventory of parts required and simplifies maintenance by enabling a modular design that supports various configurations with a single common head, minimizing interference between modules.
Implementation Method 1
The feed apertures are positioned for fluid communication of the combustion reagents between that gallery and a corresponding plenum
Implementation Method 2
at least one aperture through which inlet nozzles extend to convey one or more effluent streams to the combustion chambers
Data Source
Figure 1(A)~1(C)
Figure 2~3
Figure 4~5
AI summary
An inlet assembly, an abatement apparatus and a method are disclosed. The inlet assembly is for an abatement apparatus for treating an effluent stream from a semiconductor processing tool and comprises: a combustion chamber module defining a plenum configured to supply combustion reagents to its combustion chamber, the combustion chamber module having a mount configured to interface with a common head which defines at least one gallery configured to supply the combustion reagents, the mount comprising a plurality of feed apertures positioned for fluid communication of the combustion reagents between the gallery and the plenum. In this way, a mount which is suited to its combustion chamber module interfaces with a standard or common head, which enables the combustion reagents to be supplied from the gallery of the common head via the mount and to the plenum of the combustion chamber module. This enables a common head to be used for different combustion chamber modules, which reduces the number of parts required for the assembly and maintenance of the abatement apparatus.