Modular Laser Apparatus Frame for EUV Alignment Precision
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Solution Overview
Problem
Current semiconductor production processes face challenges in achieving microfabrication with feature sizes of 32 nm or less, requiring advanced exposure apparatuses that generate extreme ultraviolet (EUV) light, particularly in maintaining precise alignment and stability of laser components within EUV light generation systems.
Innovation Solution
The design of a laser apparatus comprising multiple modules, including an oscillator, beam delivery units, and amplifiers, supported by a frame with specific mount configurations and extension mechanisms to ensure precise positioning and movement of these components, allowing for efficient EUV light generation and maintenance access.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If multiple laser modules are integrated into a compact frame structure, then the space utilization and integration density are improved, but the alignment precision and stability of laser components deteriorate
Solution Approach 1:
The laser apparatus is divided into multiple independent modules (oscillator module, beam delivery unit module, amplifier module), each with its own support portions. These modules are then mounted on the frame through separate mounts, allowing each module to be precisely positioned and aligned independently while maintaining overall system compactness.
2Stability of the object's composition
If multiple support portions are used to stabilize laser modules, then the structural stability is improved, but the device complexity increases
Solution Approach 1:
Multiple support portions (first, second, and third support portions) are integrated into a single unified module structure. This consolidated support system provides stable positioning for the laser module while avoiding the complexity of multiple separate support mechanisms, as the support portions work together as a coordinated system.
3Ease of repair
If modules are designed with multiple movable support portions, then the ease of maintenance and access is improved, but the positioning precision and structural rigidity deteriorate
Solution Approach 1:
The support portions are designed to be movable relative to the frame, allowing modules to be easily accessed for maintenance by moving them away from their operating positions. However, during operation, the support portions are fixed to ensure precise positioning and stable laser beam generation, thus maintaining both accessibility and positioning precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables stable and precise EUV light generation, facilitating microfabrication at 32 nm or less by maintaining component alignment and allowing for easy maintenance of the laser apparatus, thereby addressing the challenges of smaller feature sizes in semiconductor production.
Implementation Method 1
a module including an amplifier for amplifying a laser beam
Data Source
AI summary
A laser apparatus may include: a first module including an oscillator configured to output a laser beam and an oscillator support portion for supporting the oscillator; a second module including a beam delivery unit for delivering the laser beam and a beam delivery unit support portion for supporting the beam delivery unit; a third module including an amplifier for amplifying the laser beam and an amplifier support portion for supporting the amplifier; and a frame on which the modules are placed, the frame including mounts on which the oscillator support portion, the beam delivery support portion and the amplifier support portion are placed.