Modular Light Source Assembly for Polishing Apparatus
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The existing optical film-thickness measuring devices in semiconductor manufacturing lack a light source that can cover a wide wavelength range, necessitating multiple light sources which are often not feasible due to space constraints on the polishing apparatus.
Innovation Solution
A polishing apparatus with a modular light-source assembly that allows easy replacement of light sources, featuring a common base with a positioning structure for different light-source modules, ensuring accurate film-thickness measurement without disrupting the light transmission path.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple light sources are provided to cover a wide wavelength range, then the measurement capability is improved, but the device complexity and space requirements increase
Solution Approach 1:
The light source system is segmented into multiple independent light source modules, each capable of emitting light at different wavelengths. These modules can be selectively installed or removed based on measurement requirements, allowing the system to cover a wide wavelength range without permanently installing all possible light sources simultaneously.
Solution Approach 2:
The light source configuration is made dynamic through the ability to replace light source modules during operation. The system can adapt its wavelength range by swapping modules, transforming from a static multi-light-source configuration to a dynamic single-module-at-a-time configuration that achieves the same versatility.
2Adaptability or versatility
If multiple light sources are arranged on the polishing table, then the wavelength range is expanded, but the available space is insufficient
Solution Approach 1:
Instead of arranging multiple light sources simultaneously on the polishing table, the system segments the light source functionality into separate modules that are installed one at a time. This segmentation allows the full wavelength range capability to be achieved without requiring space for all light sources to coexist on the limited polishing table surface.
Solution Approach 2:
The system transitions from a static spatial arrangement of multiple light sources to a dynamic temporal arrangement where different light source modules are installed at different times. This dynamic approach maintains wavelength range versatility while eliminating the space conflict that would arise from simultaneous installation.
3Device complexity
If a fixed light source configuration is used, then the device structure is simplified, but the adaptability to different film types and thicknesses is reduced
Solution Approach 1:
The light source assembly incorporates a dynamic module replacement mechanism that allows the system to adapt its characteristics based on measurement requirements. While the base structure remains simple and fixed, the interchangeable modules provide the necessary adaptability for different film types and thicknesses, achieving both structural simplicity and functional versatility.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables flexible and accurate film-thickness measurement across various wavelengths by allowing the use of different light sources without altering the light transmission setup, improving measurement precision and operational efficiency.
Implementation Method 1
a spectrometer coupled to the light-receiving transmission line, the spectrometer being configured to decompose reflected light, transmitted from the wafer through the light-receiving transmission line, in accordance with wavelength and measure intensity of the reflected light at each of wavelengths
Implementation Method 2
a light-source module having a lamp for emitting light
Implementation Method 3
a light-emitting transmission line having a distal end located at a predetermined position in the polishing table; a light-receiving transmission line having a distal end located at the predetermined position in the polishing table
Data Source
AI summary
There is disclosed a polishing apparatus which allows for easy replacement of a light source with another type of light source. The light-source assembly includes: a base fixed to a polishing table and coupled to a light-emitting transmission line; and a light-source module having a lamp for emitting light. The light-source module is removably attached to the base. The base is a common base which is adapted to any of a plurality of light-source modules of different types including the light-source module. The base includes a positioning structure which achieves positioning of the light-source module relative to the base.