Modular Linear Accelerator Assembly for Ion Implantation
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Solution Overview
Problem
Current linear accelerators in ion implantation systems are fixed and inflexible, limiting customization and adaptability to meet customer and product-specific needs.
Innovation Solution
A modular linear accelerator assembly with a central support and interchangeable modules, including quadrupole and resonator modules, allows for precise alignment and customization of the beamline architecture to accommodate various configurations and meet specific processing requirements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If a fixed platform is used for the linear accelerator, then structural stability is improved, but adaptability and customization capability deteriorate
Solution Approach 1:
The linear accelerator is divided into multiple interchangeable modules that can be independently selected and configured. Each module contains specific components (electrodes, resonators, quadrupoles) that can be swapped to create different beamline configurations, enabling customization while maintaining overall system stability through the fixed platform.
2Adaptability or versatility
If a modular design with interchangeable modules is implemented, then adaptability and customization are improved, but device complexity increases
Solution Approach 1:
The modular components are designed with universal interfaces and standardized mounting mechanisms that allow the same basic module types to serve multiple functions in different configurations. This reduces the number of unique parts needed and simplifies the overall system architecture despite the increased customization capability.
3Manufacturing precision
If precise alignment of beamline components is required, then manufacturing precision must be increased, but ease of assembly and modification deteriorates
Solution Approach 1:
Alignment features and mounting interfaces are pre-configured on each module during manufacturing. The modules include built-in alignment mechanisms such as precision machined surfaces,定位 holes, and adjustment features that enable accurate beamline alignment to be achieved through simple module installation rather than complex post-assembly adjustments.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables high-energy ion implantation systems with customizable configurations, maintaining precision and flexibility, allowing for user modification to meet custom needs while ensuring high precision and efficient ion beam delivery.
Implementation Method 1
LINACs may be driven by a signal using a resonator circuit including a coil and a capacitor
Implementation Method 2
at least one module of the plurality of modules including an electrode having an aperture for receiving and delivering an ion beam along a beamline axis
Data Source
AI summary
Embodiments herein are directed to a linear accelerator assembly for an ion implanter. In some embodiments, the linear accelerator assembly may include a central support within a chamber, and a plurality of modules coupled to the central support, at least one module of the plurality of modules including an electrode having an aperture for receiving and delivering an ion beam along a beamline axis.