Modular Maintenance Automation for Semiconductor Cleaning and Reassembly
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Solution Overview
Problem
Current semiconductor manufacturing maintenance processes are inefficient due to manual handling and lack of automation, leading to increased time, errors, and reduced equipment lifespan.
Innovation Solution
A modular maintenance automation equipment and method that includes separate modules for fastening, cleaning, and storage, utilizing a mobile robot and transport modules with inspectors and cleaners to automate the separation, cleaning, and reassembly of modular devices, minimizing human intervention and improving precision.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If manual handling is used for maintenance processes, then flexibility and adaptability are maintained, but maintenance time increases and efficiency decreases
Solution Approach 1:
The maintenance equipment is divided into multiple independent modules including a first module for fastening/separation/inspection, a second module for cleaning/inspection, a transport module, and storage modules. Each module performs a specific function and can operate independently, enabling automated maintenance processes while maintaining system flexibility.
Solution Approach 2:
A transport module acts as an intermediary between the first module, second module, and storage modules. This intermediary component automatically transfers modular devices between different processing stages, eliminating manual handling and significantly reducing maintenance time while improving overall automation level.
2Measurement precision
If manual inspection and cleaning are performed, then equipment complexity is low, but measurement precision and manufacturing precision decrease
Solution Approach 1:
The first module and second module both include inspection devices (cameras) that can perform multiple functions: inspecting the modular device condition, verifying cleaning quality, and documenting the maintenance process. This multi-functionality improves measurement precision without proportionally increasing equipment complexity.
Solution Approach 2:
Manual inspection and cleaning operations are replaced with automated inspection devices (cameras) and cleaning devices that spray chemicals. This substitution significantly improves measurement and cleaning precision while the modular design keeps overall equipment complexity manageable.
3Loss of time
If modular device separation and reassembly are performed manually, then adaptability is maintained, but maintenance time and error rate increase
Solution Approach 1:
The fastening device is configured to automatically separate the modular device into first and second portions before cleaning and inspection processes. This preliminary automated separation action reduces maintenance time and eliminates manual handling errors, while the standardized coupling portions maintain operational simplicity.
Solution Approach 2:
The maintenance system performs self-service through automated fastening/separation, cleaning, inspection, and reassembly processes. The modular device is automatically handled throughout the maintenance cycle, significantly reducing maintenance time and error rates while the standardized interface design maintains ease of operation.
4Reliability
If comprehensive cleaning and inspection processes are implemented, then reliability improves, but device complexity increases
Solution Approach 1:
The comprehensive maintenance process is segmented into distinct functional modules: fastening/separation, inspection, cleaning, drying, and reassembly. Each module performs a specific function with dedicated equipment, improving reliability through specialized processing while the modular architecture prevents overall system complexity from becoming unmanageable.
Solution Approach 2:
The maintenance process maintains continuity with automated transport between modules, ensuring the modular device moves continuously through cleaning, inspection, and drying stages without manual intervention. This continuous automated process improves reliability while the standardized module interfaces keep equipment complexity controlled.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The automation significantly reduces maintenance time, enhances efficiency, and improves the reliability and safety of the maintenance process by precise handling and quantitative evaluation, reducing errors and extending equipment lifespan.
Implementation Method 1
a cleaning device configured to spray a chemical toward the second support
Data Source
AI summary
A maintenance automation equipment includes: a first module comprising: a first support supporting a modular device, a fastening device configured to separate or fasten the modular device, a first inspector comprising a camera, and a first transporter, wherein the fastening device and the first inspector are at one end of the first transporter; a second module comprising: a second support, a cleaning device configured to spray a chemical toward the second support, a second inspector comprising an optical camera, and a second transporter, wherein the cleaning device and the second inspector are at one end of the second transporter; a transport module comprising an inter-module transporter; a first storage module; and a second storage module.