Modular MEMS Scanner With Segmented Piezoelectric Actuators
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Solution Overview
Problem
High-performance laser scanning devices require scanners with low distortion, large scanning angles, and low power consumption, but existing designs often suffer from increased manufacturing complexity and cost due to complex mirror structures and forces applied during rotation, leading to performance and cost challenges.
Innovation Solution
The development of modular scanners with separately formed piezoelectric actuators, MEMS scan plates, and flexure structures, which are formed from a unitary semiconductor substrate, allowing for stronger actuation, reduced distortion, and simplified manufacturing, enabling improved scanning performance and cost-effectiveness.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If mirror rotation speed and angles are increased to achieve larger scanning angles, then scanning performance is improved, but forces applied to the mirror increase causing increased distortions in the mirror surface
Solution Approach 1:
The scanner is divided into separate functional components: a scan plate formed from a unitary MEMS semiconductor substrate and separately formed piezoelectric actuators that are coupled to the scan plate. This segmentation allows the scan plate to be optimized for low distortion while the actuators provide the necessary driving forces.
Solution Approach 2:
The scanner combines different materials and structures: a MEMS semiconductor substrate for the scan plate providing structural integrity and low distortion, and piezoelectric actuators providing precise control. This composite approach allows each component to be optimized for its specific function.
2Reliability
If complex structures and shapes are used in scanning mirror designs to achieve high performance, then scanning performance is improved, but manufacturing complexity increases leading to reduced yield and increased device costs
Solution Approach 1:
The scanner is divided into separate functional components: a scan plate formed from a unitary MEMS semiconductor substrate and separately formed piezoelectric actuators that are coupled to the scan plate. This segmentation allows the scan plate to be optimized for low distortion while the actuators provide the necessary driving forces.
Solution Approach 2:
The invention changes the actuation mechanism from traditional motor-driven rotation to piezoelectric actuation, fundamentally altering how the scan plate is moved. This parameter change enables precise control with simpler, more manufacturable structures.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The modular scanner design provides improved scanning performance with reduced distortion and manufacturing complexity, resulting in more robust and cost-effective high-performance scanning laser devices for applications like projectors, LIDAR, and 3D motion sensing.
Implementation Method 1
The at least one piezoelectric actuator is configured to generate motion of the scan plate in response to suitable drive signal
Data Source
AI summary
The embodiments described herein include scanners that can provide improved scanning laser devices. Specifically, the embodiments described herein provide scanners with a modular construction that includes one or more separately formed piezoelectric actuators coupled to a microelectromechanical system (MEMS) scan plate, flexure structures, and scanner frame. Such modular scanners can provide improved scanning laser devices, including scanning laser projectors and laser depth scanners, LIDAR systems, 3D motion sensing devices, gesture recognition devices, etc.