Modular MEMS Scanner With Segmented Scan Plate
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Solution Overview
Problem
Scanning laser devices face challenges with mechanical distortion in scanning mirrors due to increased rotational forces, leading to reduced image quality, and there is a need for compact, high-performance designs that simplify manufacturing and reduce costs.
Innovation Solution
The implementation of modular scanning mirrors with a separately formed scan plate coupled to a microelectromechanical system (MEMS) flexure structure, which includes coupling features and flexure arms that facilitate rotation, allowing for reduced distortion and compact size while maintaining performance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If mirror rotation angles and speed are increased to improve scanning performance, then scanning speed and coverage are improved, but mechanical distortion in the mirror surface increases due to applied forces
Solution Approach 1:
The scanner is divided into two separate components: a scan plate (mirror) and a flexure structure. This segmentation allows the mirror to be optimized for optical performance while the flexure structure handles mechanical rotation, reducing mirror distortion even at high rotation speeds.
Solution Approach 2:
The mechanical rotation function is extracted from the mirror and placed in the flexure structure. This allows the mirror to remain stationary relative to the rotation forces, eliminating the mechanical distortion that would occur if the mirror itself rotated under high-speed conditions.
2Volume of moving object
If more complex scanner structures are designed to achieve compact size while maintaining performance, then device compactness is improved, but manufacturing complexity increases
Solution Approach 1:
The scan plate and flexure structure are combined into a single integrated scanner assembly that can be manufactured as one piece using standard MEMS processes. This merging reduces the number of separate components and assembly steps, simplifying manufacturing while achieving compact dimensions.
Solution Approach 2:
The scanner utilizes out-of-plane bending modes to achieve rotation, changing the mechanical parameter from in-plane rotation to out-of-plane flexing. This parameter change enables compact design while maintaining simple manufacturing processes through standard MEMS fabrication techniques.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration provides improved flexibility, reduced distortion, and simplified manufacturing, resulting in enhanced scanning laser devices with improved image quality and reduced manufacturing complexity and costs.
Implementation Method 1
a first portion of the first flexure arm and a second portion of the second flexure arm overlap with the scanning surface
Data Source
AI summary
The embodiments described herein provide scanners with a modular construction that includes a separately formed scan plate coupled to a microelectromechanical system (MEMS) flexure structure. Such modular scanners, when incorporated into laser scanning devices, reflect laser light into a pattern of scan lines. In general, the modular scanner includes a scan plate that is formed separately from the flexure structure. The scan plate and flexure structure each include coupling features that serve to couple the scan plate to the flexure structure. The flexure structure includes flexure arms that facilitate rotation of the scan plate to reflect laser light into a pattern of scan lines.